Patents by Inventor Paul C. Knutrud

Paul C. Knutrud has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay registration error measurement made simultaneously for more than two semiconductor wafer layers
    Patent number: 6612159
    Abstract: An improved target and a technique for using it to measure registration relative to each other of more than two layers of a semiconductor wafer. At least first, second and third layers are formed to overlay each other. A first pattern is provided in a designated location of the first layer. A second pattern is provided in a designated location of the second layer, such second pattern having a given shape and a given size, and having at least one discontinuity formed therein at a predetermined location. A third pattern is provided in a designated location of the third layer, such third pattern having the given shape and the given size of the second pattern, and having at least one discontinuity formed therein at a predetermined location, wherein a portion of each one of the second and third patterns fits within the at least one discontinuity in the other when the second and third layers are in registration with each other.
    Type: Grant
    Filed: August 25, 2000
    Date of Patent: September 2, 2003
    Assignee: Schlumberger Technologies, Inc.
    Inventor: Paul C. Knutrud