Patents by Inventor Paul Consoli

Paul Consoli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer scanning apparatus and method for focused beam processing
    Patent number: 11915906
    Abstract: A method of scanning a wafer includes placing the wafer over a substrate holder inside a processing chamber, where the wafer is placed at a first twist angle relative to a reference axis of a rotatable feedthrough of the processing chamber. The method further includes performing a first pass scan by exposing the wafer to an ion beam while driving two rotary drives disposed in a scanning chamber synchronously to generate a planar motion of the wafer from a rotational motion of the two rotary drives, where the wafer is oriented continuously at the first twist angle when performing the first pass scan.
    Type: Grant
    Filed: February 2, 2023
    Date of Patent: February 27, 2024
    Assignee: TEL Manufacturing and Engineering of America, Inc.
    Inventors: Matthew Gwinn, Paul Consoli, Jerry Negrotti
  • Wafer Scanning Apparatus and Method for Focused Beam Processing
    Publication number: 20230187168
    Abstract: A method of scanning a wafer includes placing the wafer over a substrate holder inside a processing chamber, where the wafer is placed at a first twist angle relative to a reference axis of a rotatable feedthrough of the processing chamber. The method further includes performing a first pass scan by exposing the wafer to an ion beam while driving two rotary drives disposed in a scanning chamber synchronously to generate a planar motion of the wafer from a rotational motion of the two rotary drives, where the wafer is oriented continuously at the first twist angle when performing the first pass scan.
    Type: Application
    Filed: February 2, 2023
    Publication date: June 15, 2023
    Inventors: Matthew Gwinn, Paul Consoli, Jerry Negrotti
  • Wafer scanning apparatus and method for focused beam processing
    Patent number: 11587760
    Abstract: A scanning system includes a scanning chamber; a first rotary drive disposed in the scanning chamber and configured to rotate around a first axis; a second rotary drive disposed in the scanning chamber and configured to rotate around the first axis synchronously with the first rotary drive; and a bar-and-hinge system disposed in the scanning chamber and mechanically coupled to a substrate holder, the hinge system configured to translate a rotary motion of the first rotary drive and the second rotary drive to a planar motion of the substrate holder.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: February 21, 2023
    Assignee: TEL Manufacturing and Engineering of America, Inc.
    Inventors: Matthew Gwinn, Paul Consoli, Jerry Negrotti
  • Wafer Scanning Apparatus and Method for Focused Beam Processing
    Publication number: 20210335642
    Abstract: A scanning system includes a scanning chamber; a first rotary drive disposed in the scanning chamber and configured to rotate around a first axis; a second rotary drive disposed in the scanning chamber and configured to rotate around the first axis synchronously with the first rotary drive; and a bar-and-hinge system disposed in the scanning chamber and mechanically coupled to a substrate holder, the hinge system configured to translate a rotary motion of the first rotary drive and the second rotary drive to a planar motion of the substrate holder.
    Type: Application
    Filed: October 14, 2020
    Publication date: October 28, 2021
    Inventors: Matthew Gwinn, Paul Consoli, Jerry Negrotti