Abstract: A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

Abstract: A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

Abstract: A rough-vacuum pump of dry type includes a duct formed in the stator and of which an inlet orifice is intended to be connected to at least one source of purge gas and of which at least one outlet orifice communicates with the last pumping stage communicating with the delivery and a device for injecting a heated purge gas including a heating device to at least partly heat the purge gas injected into the duct to a temperature higher than 40° C.

Abstract: A method is provided for controlling a temperature of a vacuum pump of a dry vacuum pump type subjected to variable pumping loads, the pump including a stator, a pumping stage, two shafts extending into the stage and respectively bearing a rotor to rotate synchronously in opposite directions in the stator and to drive a gas from a suction inlet to a delivery outlet, a cooling element coupled to the stator, a temperature sensor to measure a stator temperature, and a controller to control the stator temperature by the cooling element and the temperature sensor; and the method including controlling the pump temperature by the cooling element based on a temperature setpoint and a measurement of the stator temperature, and monitoring whether a value of a pumping load parameter is below a load threshold and, if so, increasing the setpoint. A vacuum pump and a system are also provided.