Patents by Inventor Paul Denham

Paul Denham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum compatible, high-speed, 2-D mirror tilt stage
    Publication number: 20060262435
    Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.
    Type: Application
    Filed: May 19, 2005
    Publication date: November 23, 2006
    Applicant: EUV LLC
    Inventor: Paul Denham