Patents by Inventor Paul Douglas MacDonald

Paul Douglas MacDonald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of and apparatuses for measuring electrical parameters of a plasma process
    Patent number: 9029728
    Abstract: A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and may include a transducer coupled to the at least one sensing element. The transducer can be configured to receive a signal from the sensing element and convert the signal into a second signal for input to the information processor.
    Type: Grant
    Filed: April 14, 2014
    Date of Patent: May 12, 2015
    Assignee: KLA-TENCOR Corporation
    Inventors: Randall S. Mundt, Paul Douglas MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos
  • METHODS OF AND APPARATUSES FOR MEASURING ELECTRICAL PARAMETERS OF A PLASMA PROCESS
    Publication number: 20140312916
    Abstract: A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and may include a transducer coupled to the at least one sensing element. The transducer can be configured to receive a signal from the sensing element and convert the signal into a second signal for input to the information processor.
    Type: Application
    Filed: April 14, 2014
    Publication date: October 23, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Randall S. Mundt, Paul Douglas MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos
  • Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
    Patent number: 8698037
    Abstract: A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and may include a transducer coupled to the at least one sensing element. The transducer can be configured to receive a signal from the sensing element and convert the signal into a second signal for input to the information processor.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: April 15, 2014
    Assignee: KLA-Tencor Corporation
    Inventors: Randall S. Mundt, Paul Douglas MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos
  • METHODS OF AND APPARATUSES FOR MAINTENANCE, DIAGNOSIS, AND OPTIMIZATION OF PROCESSES
    Publication number: 20090292506
    Abstract: One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.
    Type: Application
    Filed: August 7, 2009
    Publication date: November 26, 2009
    Applicant: KLA-Tencor Corporation
    Inventors: Paul Douglas MacDonald, Michiel V.P. Kruger, Michael Welch, Mason L. Freed, Costas J. Spanos
  • Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
    Patent number: 7580767
    Abstract: One aspect of the present invention is a method of monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. Another aspect of the present invention is a system configured for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece.
    Type: Grant
    Filed: July 11, 2005
    Date of Patent: August 25, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Paul Douglas MacDonald, Michiel V. P. Krüger, Michael Welch, Mason L. Freed, Costas J. Spanos