Patents by Inventor Paul Dozoretz
Paul Dozoretz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10021739Abstract: A trimmable heater mat has a plurality of heater mat segments that together comprise a length of the heater mat. Each of the heater mat segments has a segment heater element connected to a power bus for generating heat. One or more of the heater mat segments can be severed from the others and removed from the heater mat to trim the length of the heater mat to a desired length. Heater mat segment boundary indicia on the heater mat indicate locations where one of the heater mat segments can be severed from the other remaining heater mat segments of the heater mat without interfering with the segment heater elements of the remaining heater mat segments or with the connections of the remaining segment heater elements to the power bus.Type: GrantFiled: July 8, 2015Date of Patent: July 10, 2018Assignee: MKS Instruments, Inc.Inventors: Jeffrey D. Kiernan, Karl Hausmann, Paul Dozoretz
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Patent number: 9686821Abstract: Heater modules are configured for streamlined daisy chain connectivity that includes front end and intermediate daisy chain power injection, water resistant heater assemblies, and shielding. A power injection device is configured with connectivity for insertion of power into heater modules that are in front and intermediate daisy chain positions while enabling data communications between heater modules positioned on opposite sides of the power injection locations.Type: GrantFiled: April 28, 2014Date of Patent: June 20, 2017Assignee: MKS Instruments, Inc.Inventors: Jeffrey D. Kiernan, Karl Hausmann, Paul Dozoretz
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Publication number: 20170013678Abstract: A trimmable heater mat has a plurality of heater mat segments that together comprise a length of the heater mat. Each of the heater mat segments has a segment heater element connected to a power bus for generating heat. One or more of the heater mat segments can be severed from the others and removed from the heater mat to trim the length of the heater mat to a desired length. Heater mat segment boundary indicia on the heater mat indicate locations where one of the heater mat segments can be severed from the other remaining heater mat segments of the heater mat without interfering with the segment heater elements of the remaining heater mat segments or with the connections of the remaining segment heater elements to the power bus.Type: ApplicationFiled: July 8, 2015Publication date: January 12, 2017Applicant: MKS INSTRUMENTS, INC.Inventors: Jeffrey D. Kiernan, Karl Hausmann, Paul Dozoretz
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Publication number: 20150312963Abstract: Heater modules are configured for streamlined daisy chain connectivity that includes front end and intermediate daisy chain power injection, water resistant heater assemblies, and shielding. A power injection device is configured with connectivity for insertion of power into heater modules that are in front and intermediate daisy chain positions while enabling data communications between heater modules positioned on opposite sides of the power injection locations.Type: ApplicationFiled: April 28, 2014Publication date: October 29, 2015Applicant: MKS INSTRUMENTS, INC.Inventors: Jeffrey D. Kiernan, Karl Hausmann, Paul Dozoretz
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Patent number: 7962294Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.Type: GrantFiled: January 13, 2009Date of Patent: June 14, 2011Assignee: MKS Instruments, IncInventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Patent number: 7871587Abstract: A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.Type: GrantFiled: December 22, 2009Date of Patent: January 18, 2011Assignee: MKS Instruments, Inc.Inventors: Youfan Gu, Paul Dozoretz
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Publication number: 20100166630Abstract: A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.Type: ApplicationFiled: December 22, 2009Publication date: July 1, 2010Applicant: MKS INSTRUMENTS, INC.Inventors: Youfan Gu, Paul Dozoretz
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Publication number: 20090228219Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.Type: ApplicationFiled: January 13, 2009Publication date: September 10, 2009Applicant: MKS INSTRUMENTS, INC.Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Patent number: 7477996Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.Type: GrantFiled: June 6, 2007Date of Patent: January 13, 2009Assignee: MKS Instruments, Inc.Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Publication number: 20070288179Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.Type: ApplicationFiled: June 6, 2007Publication date: December 13, 2007Applicant: MKS INSTRUMENTS, INC.Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Publication number: 20060004539Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.Type: ApplicationFiled: June 21, 2005Publication date: January 5, 2006Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Patent number: 6909975Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.Type: GrantFiled: November 24, 2003Date of Patent: June 21, 2005Assignee: MKS Instruments, Inc.Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Publication number: 20050114070Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.Type: ApplicationFiled: November 24, 2003Publication date: May 26, 2005Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Patent number: 6895178Abstract: The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.Type: GrantFiled: July 16, 2002Date of Patent: May 17, 2005Assignee: MKS Instruments, Inc.Inventors: Youfan Gu, Paul Dozoretz, Benjamin Goss, David Neumeister, James Mueller, Donald W. Higgins
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Patent number: 6562109Abstract: Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.Type: GrantFiled: March 28, 2001Date of Patent: May 13, 2003Assignee: MKS Instruments, Inc.Inventors: Darren Livingston, Youfan Gu, Paul Dozoretz, James M. Mueller
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Publication number: 20030063901Abstract: The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.Type: ApplicationFiled: July 16, 2002Publication date: April 3, 2003Inventors: Youfan Gu, Paul Dozoretz, Benjamin Goss, David Neumeister, James Mueller, Donald W. Higgins
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Publication number: 20020139249Abstract: Trap apparatus and method for removing contaminants from the gaseous effluent flows from chemical vapor deposition chambers and processes by flowing the particle laden gas into an upper chamber of the trap apparatus, imparting additional kinetic energy to the powder particles to enhance separation of the powder particles from the gas, and then flowing the gas, sans the powder particles, out of the trap, while the powder particles fall into and are captured by a lower chamber positioned below the upper chamber and remote from the flowing gas. An impeller positioned in the upper chamber in the inlet path imparts the additional kinetic energy. For some reaction gas systems, an optional reactor with hydrophillic, rotating growth substrates enhance and accelerate growth of solid particles, which are then dislodged from the media, and fed by the flowing gas into the upper chamber for capture as previously described.Type: ApplicationFiled: March 28, 2001Publication date: October 3, 2002Inventors: Darren Livingston, Youfan Gu, Paul Dozoretz, James M. Mueller
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Patent number: 6361607Abstract: A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.Type: GrantFiled: February 12, 2001Date of Patent: March 26, 2002Assignee: MKS Instruments, Inc.Inventors: Paul Dozoretz, Youfan Gu
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Publication number: 20010017080Abstract: A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.Type: ApplicationFiled: February 12, 2001Publication date: August 30, 2001Inventors: Paul Dozoretz, Youfan Gu
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Patent number: 6197119Abstract: A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding fuction and solid and liquid phase TEOS polymer trapping function.Type: GrantFiled: February 18, 1999Date of Patent: March 6, 2001Assignee: MKS Instruments, Inc.Inventors: Paul Dozoretz, Youfan Gu