Abstract: A scribe mark reader (10) uses a source of circularly polarized light and a holographic beam-shaping optical element (40) to uniformly illuminate an area of a substrate (20) that includes a scribe mark (18). Light incident on the substrate at a scribe mark is predominantly scattered, whereas light incident on the substrate at a processed area (30) of the wafer surface between the pits (28) of the scribe mark is predominantly specularly reflected. The phase-reversed, specularly reflected light from the processed area is blocked by a circular analyzer that passes light scattered from the scribe mark. Light passing the polarizer can then be used to form an image of the scribe mark. The intensity of the images formed are sufficiently consistent that the automatic gain control of the CCD camera can be used and the images formed can be readily interpreted by optical character recognition software.

Abstract: The present invention is a compact specimen inspection station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26,28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). The station is also equipped with a microscope (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.

Abstract: A tiltable specimen holder (48) in an apparatus (46) for performing an automated operation on a selected one of multiple specimens (12) contained in a specimen carrier (10) has a receiving member (60) that, when oriented in a load position (48C; FIG. 10), receives the carrier from, or presents the carrier to, the hand (108) of a human being (110) without substantial flexure of the human being's wrists (112). The holder also has a bottom member (62) that cooperates with the receiving member and a support member (32, 34) of the carrier to place and hold the carrier in a predetermined alignment relative to the receiving member. The receiving member has beveled edges (84, 86, 88) that cooperate with a guide member (28, 30) of the carrier to guide the carrier to self-align into grooves (90, 92) defined by the beveled edges. Rollers (94) in the grooves cooperate with the guide members to guide the carrier to the predetermined alignment.

Abstract: A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. The rotary stage is mounted on the X-Y stage and receives a semiconductor wafer (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan a peripheral edge (76) of the wafer across an optical scanning assembly (36, 270) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122, 280) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.

Abstract: A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. In a preferred embodiment, the rotary stage is mounted on the X-Y stage and receives a semiconductor (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan the peripheral edge (76) of the wafer across an optical scanning assembly (36) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.

Abstract: The present invention is a compact specimen processing station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26, 28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). A specimen processing station (10) that performs inspection functions is equipped with a processing means (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.

Abstract: Specimen carrier carousels adapted to support a plurality of specimen carriers in a radial configuration and selectively position specimen carriers at associated processing stations are disclosed. Specimen carriers mounted on the carousel are automatically tilted during rotation of the carousel to properly seat the specimens in their respective carriers and to prevent specimen movement during rotation. Specimen carrier platforms are also disclosed. A scanning assembly is provided in association with a carrier platform or at least one carrier station of a carrier carousel to monitor and verify the orientation of specimens within a carrier prior to commencement of processing operations. A subtilt assembly may be provided to correct the orientation of specimens identified as mispositioned during the scanning operation and to facilitate detection of the presence and location of specimens in a carrier.

Abstract: The present invention is a compact specimen inspection station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26,28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). The station is also equipped with a microscope (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.

Abstract: A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. In a preferred embodiment, the rotary stage is mounted on the X-Y stage and receives a semiconductor (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan the peripheral edge (76) of the wafer across an optical scanning assembly (36) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.

Abstract: A high precision linear actuator includes high fidelity mechanical linkages between the motor drive and the linear displacement output shaft. Rotational motor drive output is conveyed to a rotatable spindle (20) and lead nut assembly by means of belt driven sprockets. Rotation of the lead nut assembly is converted to linear displacement of a non-rotating lead screw and output shaft. Linear actuators of the present invention also incorporate a feedback control feature employing Moire fringe pattern techniques to continuously monitor the position of the output shaft.

Abstract: A method and an apparatus scan a light beam (62) along an arcuate scan path (148 and 150) across a bar code symbol (48) to decode it. In a preferred embodiment, a robotic semiconductor wafer handler (10) rotates a fixed-beam optical scanning assembly (44) beneath the bar code symbol inscribed in and near the periphery of the bottom surface (50) of a stationary semiconductor wafer (12). The rotation of the optical scanning assembly is characterized as a series of angular positions. The bar code symbol is decoded by determining the angular position of each of the bars of the bar code symbol during the rotation of the optical scanning assembly. A microprocessor-based scan data processing system (60) included within the wafer handler carries out a decoding algorithm to determine the distances between adjacent bars, thereby to decode the bar code symbol.