Patents by Inventor Paul E. Denham

Paul E. Denham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum compatible, high-speed, 2-D mirror tilt stage
    Patent number: 7273289
    Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: September 25, 2007
    Assignee: Euv LLC
    Inventor: Paul E. Denham
  • Miniature self-contained vacuum compatible electronic imaging microscope
    Patent number: 6327102
    Abstract: A vacuum compatible CCD-based microscopic camera with an integrated illuminator. The camera can provide video or still feed from the microscope contained within a vacuum chamber. Activation of an optional integral illuminator can provide light to illuminate the microscope subject. The microscope camera comprises a housing with a objective port, modified objective, beam-splitter, CCD camera, and LED illuminator.
    Type: Grant
    Filed: March 7, 2000
    Date of Patent: December 4, 2001
    Assignee: The Regents of the University of California
    Inventors: Patrick P. Naulleau, Phillip J. Batson, Paul E. Denham, Michael S. Jones