Abstract: A specimen holding apparatus includes a main body, a specimen supporting surface provided on the main body, and a restraining element movable along the main body in a direction substantially parallel to the longitudinal axis of the main body from a first position in which the restraining element is removed from the specimen supporting surface to a second position in which the restraining element encroaches over the specimen supporting surface. An alternate specimen holding apparatus includes a main body, a specimen supporting surface provided on the main body in a first horizontal plane, and a restraining element attached to the main body that is rotatable in a second horizontal plane substantially parallel to the first horizontal plane between a first position in which the restraining element is removed from the specimen supporting surface and a second position in which the restraining element encroaches over the specimen supporting surface.

Abstract: A plasma processing method and apparatus are disclosed in which a low energy, high frequency plasma is utilized to remove both amorphous damage resulting from various specimen preparation techniques and contamination, mainly in form of hydrocarbons, from transmission electron microscopy specimens and specimen holders. The system comprises a vacuum system, a plasma chamber into which the specimen and the specimen holder are inserted, a housing having an access port with removable inner sleeve components, and a high frequency power supply which is coupled to the plasma chamber and enables both the generation and maintenance of the plasma. The inner sleeve components are preferably capable of accepting specimen holders produced by all manufacturers of transmission electron microscopes. In the preferred embodiment, the vacuum system comprises an oil-free vacuum system. To commence processing, the vacuum system is engaged for the evacuation of the plasma chamber for subsequent formation of the plasma.