Patents by Inventor Paul E. Herning

Paul E. Herning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for growing films on a substrate
    Patent number: 4946543
    Abstract: A method and apparatus for growing films on a plurality of substrates is disclosed. The apparatus includes a substrate rack for securing a plurality of substrates on a predetermined position. An ampoule is also provided which environmentally isolates the substrates. The ampoule includes first and second reservoirs for storing source material at opposite ends of ends of the ampoule.
    Type: Grant
    Filed: March 29, 1988
    Date of Patent: August 7, 1990
    Inventors: Murray H. Kalisher, Paul E. Herning
  • Method and solution for etching indium antimonide
    Patent number: 4396459
    Abstract: A method for delineating defects in the <111> surface of an indium antimonide crystal wafer by treating said surface with a 5 percent solution of iodine in N,N-dimethylacetamide to form triangularly shaped etch pits in the defect area.
    Type: Grant
    Filed: September 16, 1982
    Date of Patent: August 2, 1983
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: Paul E. Herning, Edward Y. Sutcliffe