Abstract: A system and method for acquisition of mass spectrometry data is configured to provide a stream of charged particles (e.g., from an analytical volume). A primary mass spectrometer (e.g., time-of-flight mass spectrometer) may be used to separate charged particles of the stream of charged particles based on their mass-to-charge ratio and detect the charged particles in a mass-to-charge spectrum. A stream of precursor ions having a selected mass range may be diverted from the stream of charged particles for fragmentation to provide fragment ions (e.g., fragment ions from the analytical volume). The fragment ions may be provided to a second mass spectrometer for analysis of the fragment ions (e.g., during the same time as the time-of-flight mass spectrometer is separating and detecting charged particles of the stream of charged particles based on their mass-to-charge ratio).

Abstract: A system and method for acquisition of mass spectrometry data is configured to provide a stream of charged particles (e.g., from an analytical volume). A primary mass spectrometer (e.g., time-of-flight mass spectrometer) may be used to separate charged particles of the stream of charged particles based on their mass-to-charge ratio and detect the charged particles in a mass-to-charge spectrum. A stream of precursor ions having a selected mass range may be diverted from the stream of charged particles for fragmentation to provide fragment ions (e.g., fragment ions from the analytical volume). The fragment ions may be provided to a second mass spectrometer for analysis of the fragment ions (e.g., during the same time as the time-of-flight mass spectrometer is separating and detecting charged particles of the stream of charged particles based on their mass-to-charge ratio).

Abstract: A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer).

Abstract: A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a sample receiving surface configured to receive a sample and electrically connect the sample to the sample support member (e.g., wherein the sample support member is configured for application of a retarding bias potential). A grounded sample aperture member defining an aperture relative to the sample support member but electrically isolated therefrom is provided such that the aperture is proximate the sample receiving surface to expose at least a portion of a surface of a sample received thereon to be analyzed (e.g., wherein applying a retarding bias potential to the sample support member produces an electrical retarding field about the aperture that reduces the energy of emitted particles from a sample before they enter an annular-acceptance analyzer).

Abstract: Characterization of a sample, e.g., a depth profile, may be attained using one or more of the following parameters in an electron spectroscopy method or system. The one or more parameters may include using low ion energy ions for removing material from the sample to expose progressively deeper layers of the sample, using an ion beam having a low ion angle to perform such removal of sample material, and/or using an analyzer positioned at a high analyzer angle for receiving photoelectrons escaping from the sample as a result of x-rays irradiating the sample. Further, a correction algorithm may be used to determine the concentration of components (e.g., elements and/or chemical species) versus depth within the sample, e.g., thin film formed on a substrate. Such concentration determination may include calculating the concentration of components (e.g, elements and/or chemical species) at each depth of a depth profile by removing from depth profile data collected at a particular depth (i.e.

Abstract: The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using collected spectral data. For example, an acquired spectrum may be cumulatively integrated and the geometric properties of the integrated spectrum may be used to determine component concentration information. Thickness measurements for the film may be provided based on the component concentration information.

Abstract: Characterization of a sample, e.g., a depth profile, may be attained using one or more of the following parameters in an electron spectroscopy method or system. The one or more parameters may include using low ion energy ions for removing material from the sample to expose progressively deeper layers of the sample, using an ion beam having a low ion angle to perform such removal of sample material, and/or using an analyzer positioned at a high analyzer angle for receiving photoelectrons escaping from the sample as a result of x-rays irradiating the sample. Further, a correction algorithm may be used to determine the concentration of components (e.g., elements and/or chemical species) versus depth within the sample, e.g., thin film formed on a substrate. Such concentration determination may include calculating the concentration of components (e.g, elements and/or chemical species) at each depth of a depth profile by removing from depth profile data collected at a particular depth (i.e.

Abstract: The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using a comparison process (e.g., a fitting process) to compare measured peak shapes for elemental and/or chemical species (e.g., Si peak shapes previously measured for a particular process to be monitored) to collected spectral data (e.g., using a non-linear least squares fitting algorithm).

Abstract: The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using a comparison process (e.g., a fitting process) to compare measured peak shapes for elemental and/or chemical species (e.g., Si peak shapes previously measured for a particular process to be monitored) to collected spectral data (e.g., using a non-linear least squares fitting algorithm).

Abstract: The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using collected spectral data. For example, an acquired spectrum may be cumulatively integrated and the geometric properties of the integrated spectrum may be used to determine component concentration information. Thickness measurements for the film may be provided based on the component concentration information.

Abstract: Characterization of a sample, e.g., determination of a component's concentration in a thin film, may be attained by providing calibration information representative of surface spectrum measurements for a plurality of samples correlated with depth profile information for the plurality of samples. The plurality of samples are formed under a same set of process conditions. One or more surface spectrum measurements are provided for a sample to be characterized that also was formed under the same set of process conditions. At least one characteristic of the sample to be characterized (e.g., concentration of a component) is determined based on the one or more surface spectrum measurements for the sample to be characterized and the calibration information.

Abstract: Characterization of a sample, e.g., a depth profile, may be attained using one or more of the following parameters in an electron spectroscopy method or system. The one or more parameters may include using low ion energy ions for removing material from the sample to expose progressively deeper layers of the sample, using an ion beam having a low ion angle to perform such removal of sample material, and/or using an analyzer positioned at a high analyzer angle for receiving photoelectrons escaping from the sample as a result of x-rays irradiating the sample. Further, a correction algorithm may be used to determine the concentration of components (e.g., elements and/or chemical species) versus depth within the sample, e.g., thin film formed on a substrate. Such concentration determination may include calculating the concentration of components (e.g, elements and/or chemical species) at each depth of a depth profile by removing from depth profile data collected at a particular depth (i.e.

Abstract: An apparatus effects a uniform surface potential on an insulating specimen in an x-ray photoelectron or a secondary ion emission instrument in which there is positive charging of an irradiation region. An area of the specimen including the irradiation region is flooded with a beam of low energy electrons to neutralize the positive charging, causing negative charging of the flooding area. Positive ions are directed onto the flooding area to neutralize the negative charging. The electron beam has an energy less than about 2 eV and an energy spread less than about 0.5 eV. The ratio of the beam distance to its diameter is less than about 10. The ions have an energy less than 10 eV.

Abstract: An anode assembly for generating x-rays has a mounting block with a channel therethrough, with a diamond wafer mounted sealingly across an opening in the block so as to have an inner surface in contact with the coolant flowing in the channel. Alternatively, a thicker diamond member is mounted in the block with thermal conduction through the metal block. A metal anode film bonded to the outer surface of the diamond is receptive of a focused electron beam to generate x-rays. The diamond provides cooling in compensation for the film being heated by the electron beam. The assembly is useful in a scanning x-ray monochromator instrument for chemical analysis of a specimen surface.

Abstract: An instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member.

Abstract: An instrument for surface analysis includes a gun for selectively focusing an electron beam on an anode spot, or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator focuses an energy peak of the x-rays to a specimen surface, in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer with a detector provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.

Abstract: Target area on a specimen surface is located in an electron microanalyzer system that includes an electron energy analyzer and an analyzer detector. An electron gun impinges a rastering beam of incident electrons across the surface, a secondary electron detector provides corresponding signals for producing a scanning electron microscope image of the surface. Backscattered electrons effected from the incident electrons are passed through the analyzer for producing a further image that is superimposed on the SEM image to locate the target area to be subject to a separate microanalysis. Particularly for an electrically insulating specimen surface, the images are produced in a single frame of rastering, and surface area and beam current are sufficient to produce the images without substantial charge buildup.

Abstract: An improved nephelometer comprised of a transparent cell for containing a liquid sample, a light source, and a detector is disclosed which reduces the amount of stray light reaching the detector. The cell is characterized in that either the illuminating light beam or the detected light passes through the cell wall face at an acute angle to the normal to the cell wall face.

Abstract: In the sample introducer system disclosed herein, a sample-carrying probe engages and releases, from a sample-introducing port, a plug which closes the port when the probe is not in place. The probe then carries the plug ahead of itself into an evacuated chamber where the sample may be analyzed. Upon withdrawal of the probe, the plug is replaced so as to seal the port.