Abstract: The present invention generally provides a cost-effective method and apparatus for matching power source and transducer load impedances for an array of acoustic-wave transducers used in wet processing chambers. In one embodiment, a single radio frequency generator provides power to multiple megasonic transducers. Each transducer contains multiple piezoelectric crystals, and each processing chamber includes multiple megasonic transducers.

Abstract: Methods and apparatus for holding substrate in a compliant substrate holding assembly are provided. In one embodiment, an apparatus for a compliant substrate holding assembly includes a base plate, a finger disposed on the base plate having a V-shaped slot formed thereon, and two arms disposed on opposite ends of the base plate and each arm having V-shaped slot formed therein. In another embodiment, a method for holding a substrate on a compliant substrate holding assembly includes inserting a substrate into a holding assembly having at least three substrate supporting members and detecting a change in position of one of the substrate supporting structures.