Patents by Inventor Paul E. Lopez

Paul E. Lopez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing system and method of processing a semiconductor wafer
    Patent number: 8143074
    Abstract: A method of processing semiconductor wafers includes applying reactive gas through a plurality of inlets to the semiconductor wafers. The method further includes removing exhaust gas resulting from the step of applying reactive gas. The removing of the exhaust gas is through a plurality of outlets coupled to a manifold. The manifold combines the exhaust gas from the plurality of outlets. The method further includes measuring a pressure in each outlet of the plurality of outlets during the step of removing.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: March 27, 2012
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Robert M. Day, Paul E. Lopez
  • SEMICONDUCTOR PROCESSING SYSTEM AND METHOD OF PROCESSING A SEMICONDUCTOR WAFER
    Publication number: 20090130780
    Abstract: A method of processing semiconductor wafers includes applying reactive gas through a plurality of inlets to the semiconductor wafers. The method further includes removing exhaust gas resulting from the step of applying reactive gas. The removing of the exhaust gas is through a plurality of outlets coupled to a manifold. The manifold combines the exhaust gas from the plurality of outlets. The method further includes measuring a pressure in each outlet of the plurality of outlets during the step of removing.
    Type: Application
    Filed: November 16, 2007
    Publication date: May 21, 2009
    Inventors: Robert M. Day, Paul E. Lopez