Patents by Inventor Paul E. Spronz

Paul E. Spronz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition
    Patent number: 5746897
    Abstract: A high magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition includes a magnetron array with a plurality of magnet assemblies disposed proximate to a target. Each assembly comprises a first portion magnetized perpendicularly to the target, a second portion magnetized perpendicularly to the target and opposite the first portion, and a third portion positioned intermediate the first and second portions, the third portion magnetized parallel to the target.
    Type: Grant
    Filed: July 10, 1996
    Date of Patent: May 5, 1998
    Assignee: CVC Products, Inc.
    Inventors: Dorian Heimanson, Mehrdad M. Moslehi, Paul E. Spronz, Thomas R. Omstead