Abstract: A relay for electromagnetic radiation occurring in the optical portion of the electromagnetic spectrum has a receiver and a transmitter. The receiver senses a propagated beam of electromagnetic radiation providing a signal corresponding thereto which is shaped in an electrical circuit and provided as an excitation signal to the transmitter. An audio alignment feature is included providing audio indications for alignment of the receiver with the beam of electromagnetic radiation which is to be relayed. The transmitter is directionally adjustable to provide a relayed beam of electromagnetic radiation in a direction different from the received beam. The method includes aligning the receiver with the beam of electromagnetic radiation and converting the received electromagnetic radiation beam to a corresponding electrical signal in the receiver.

Abstract: Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.