Patents by Inventor Paul F. Marella

Paul F. Marella has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrical process monitoring using mirror-mode electron microscopy
    Patent number: 7514681
    Abstract: One embodiment relates to a method of inspecting a substrate using electrons. Mirror-mode electron-beam imaging is performed on a region of the substrate at multiple voltage differences between an electron source and a substrate, and image data is stored corresponding to the multiple voltage differences. A calculation is made of a measure of variation of an imaged aspect of a feature in the region with respect to the voltage difference between the electron source and the substrate. Other embodiments and features are also disclosed.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: April 7, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Paul F. Marella, Mark A. McCord, Marian Mankos, David L. Adler