Abstract: A room condition monitor (RCM) that includes a processor with an embedded router software object that is in signal communication with a first communication connector including an interface for the transmission receipt of data packages over a building management system (BMS) communication network according to a first network protocol. A second communication connector with a second network protocol interface is provided for communication with network legacy devises (I/O devices) through the RCM router according to a second network protocol.

Abstract: A room condition monitor (RCM) that includes a processor with an embedded router software object that is in signal communication with a first communication connector including BACnet/IP interface for the transmission receipt of data packages over a building management system (BMS) communication network according to a BACnet/IP protocol. The RCM also includes a room condition sensor for detecting a room condition. In addition, the RCM includes a projected capacitive LCD screen display to display information regarding the detected room condition, or other building information associated with the BMS. A second communication connector with a second network protocol interface is provided for communication with network legacy devises through the RCM router.

Abstract: A room condition monitor (RCM) that includes a processor with an embedded router software object that is in signal communication with a first communication connector including BACnet/IP interface for the transmission receipt of data packages over a building management system (BMS) communication network according to a BACnet/IP protocol. The RCM also includes a room condition sensor for detecting a room condition. In addition, the RCM includes a projected capacitive LCD screen display to display information regarding the detected room condition, or other building information associated with the BMS. A second communication connector with a second network protocol interface is provided for communication with network legacy devises through the RCM router.

Abstract: A pressure based mass flow controller includes a flow path for connection to a fluid source, a flow restrictor dividing the flow path into an upstream reservoir and a downstream reservoir, an upstream pressure measurement device connected to the upstream reservoir, and a flow valve connected to the flow path. The controller also includes a control device programmed to receive a desired flow rate, an indication of upstream pressure from the upstream pressure measurement device, an indication of downstream pressure from a remote downstream pressure measurement device connected to the downstream reservoir.

Abstract: A pressure based mass flow controller that can be used, for example, in semiconductor manufacturing for precisely delivering a process vapor to a process chamber. The controller can be used with a low vapor pressure source, and has a simplified, novel design, that allows the controller to be easily and inexpensively incorporated in a system including a plurality of such controllers and a plurality of vapor sources. The controller includes a flow path for connection to a vapor source, a flow restrictor dividing the flow path into an upstream reservoir and a downstream reservoir, an upstream pressure measurement device connected to the upstream reservoir, and a flow valve connected to the flow path. The controller also includes a control device programmed to receive a desired flow rate, an indication of upstream pressure from the upstream pressure measurement device, an indication of downstream pressure from a remote downstream pressure measurement device connected to the downstream reservoir.

Abstract: A gas manifold for a modular gas box system for delivering contaminant-free, precisely metered quantities of process and purge gases to a semiconductor process reaction chamber. The manifold provides the benefit of allowing the use of standard annular gaskets or o-rings for providing seals between the manifold and gas components, such as filters, valves, and pressure transducers and regulators, mounted on the manifold. The manifold includes a surface, a manifold port in the surface, and at least one station in the surface for receiving gas controlling and gas monitoring components. The station includes an inwardly facing side wall extending into the manifold from the surface to a base of the station. The base is divided into a central portion and an outer portion, the central portion having a first station port, and one of the outer portion of the base and the side wall having a second station port.