Abstract: A magnification adjustable projection system includes an imaging system having a first pair of cylindrical lens plates located within an object or image space. The first pair of cylindrical lens plates includes a first cylindrical lens plate axially movable relative to a second cylindrical lens plate. A second pair of cylindrical lens plates is located within the object or image space in optical alignment with the first pair of cylindrical lens plates. The second pair of cylindrical lens plates includes a third cylindrical lens plate axially movable relative to a fourth cylindrical lens plates. First and second actuators adjusts distances between the first and second cylindrical lens plates and between the third and fourth cylindrical lens plates. The first and second pairs of cylindrical lens plates have first and second cylindrical transverse axes that are approximately 45° relative to each other.

Abstract: A magnification adjustable projection system is provided that includes an imaging system having an object or image space, a first deformable lens plate located within the object or image space for contributing a first magnification power to the imaging system as a function of an amount of curvature of the first deformable lens plate, and a second deformable lens plate located within the object or image space for contributing a second magnification power to the imaging system as a function of an amount of curvature of the second deformable lens plate. The projection system also has first and second bending apparatuses that adjust the curvature of the first and second deformable lens plate through a range of curvature variation for adjusting the magnification power of the imaging system.

Abstract: A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

Abstract: The method of aligning a cylindrical lens in a lens assembly includes attaching the cylindrical lens to a lens fixture and interfacing the lens fixture to a support structure in which the cylindrical lens can be placed in a frontwards and backwards orientation. The method also includes capturing respective first and second line images of respective first and second focus lines as formed by the cylindrical lens in the forwards and backwards orientations. The method further includes establishing a relative orientation of the first and second line images and using the established relative orientation to determine an amount of angular misalignment of the cylindrical lens relative to a reference direction provided by the support structure. The method can include rotating the cylindrical lens relative to the lens fixture to reduce the amount of angular misalignment to be within an angular alignment tolerance.

Abstract: According to some embodiments a method of assembling an optical system comprises steps of: measuring retardance profiles of a plurality of optical elements, relatively positioning the optical elements in relative orientations that enhance complementarity between the retardance profiles of the optical elements, and securing the combinations of relatively oriented optical elements together, to control or minimize the combined retardance of the stacked optical elements.

Abstract: The method of aligning a cylindrical lens in a lens assembly includes attaching the cylindrical lens to a lens fixture and interfacing the lens fixture to a support structure in which the cylindrical lens can be placed in a frontwards and backwards orientation. The method also includes capturing respective first and second line images of respective first and second focus lines as formed by the cylindrical lens in the forwards and backwards orientations. The method further includes establishing a relative orientation of the first and second line images and using the established relative orientation to determine an amount of angular misalignment of the cylindrical lens relative to a reference direction provided by the support structure. The method can include rotating the cylindrical lens relative to the lens fixture to reduce the amount of angular misalignment to be within an angular alignment tolerance.

Abstract: Light homogenizing elements are described. The light homogenizing elements include lens arrays with corrective features designed to improve the uniformity of light fields produced by optical sources. The corrective features include masks placed at selected positions of selected lenslets in a lens array. The corrective features block or reduce the transmission of light through the lens array at the selected position to correct for spatial or angular non-uniformities in a light field produced by an optical source. Illumination systems that include a corrected lens array coupled to a light source produce highly uniform light fields. Applications include microlithography.

Abstract: A metrology apparatus has an illumination source that directs collimated light to a reference surface and to an optical component having a test surface that is in parallel with the reference surface. A first imaging lens defines a Fourier transform plane for light reflected from the reference surface and the test surface. A spatial filtering element is actuable to a blocking position that blocks specular light at the transform plane. A second imaging lens forms, at an image plane, an image of the test surface. A sensor array generates image data from received light at the image plane.

Abstract: Pressure-sensing touch systems and methods are disclosed for sensing the occurrence of a touch event based on pressure applied at a touch location. The touch system includes a light-source system and a detector system operably adjacent respective input and output edges of a waveguide. Pressure at a touch location on the waveguide gives rise to a touch event causes the waveguide to bend or flex. The waveguide bending causes a change in the optical paths of light traveling by FTIR, causing the light distribution in the output light to change. The changes are detected and are used to determine whether a touch event occurred, as well as the time-evolution of the touch event. The changes in the output light can include polarization changes caused by birefringence induced in the waveguide by the applied pressure applied. Various detector configurations are disclosed for sensing the location and pressure of a touch event.

Abstract: A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

Abstract: Pressure-sensing touch systems and methods are disclosed for sensing the occurrence of a touch event based on pressure applied at a touch location. The touch system includes a light-source system and a detector system operably adjacent respective input and output edges of a waveguide. Pressure at a touch location on the waveguide gives rise to a touch event causes the waveguide to bend or flex. The waveguide bending causes a change in the optical paths of light traveling by FTIR, causing the light distribution in the output light to change. The changes are detected and are used to determine whether a touch event occurred, as well as the time-evolution of the touch event. The changes in the output light can include polarization changes caused by birefringence induced in the waveguide by the applied pressure applied. Various detector configurations are disclosed for sensing the location and pressure of a touch event.

Abstract: Disclosed herein are lenses comprising a first surface, a second convex surface, and a central region disposed therebetween, wherein the central region comprises at least one negative axicon. Also disclosed herein are optical assemblies comprising at least one lens optically coupled to at least one light emitting device.

Abstract: According to some embodiments a method of assembling an optical system comprises steps of: measuring retardance profiles of a plurality of optical elements, relatively positioning the optical elements in relative orientations that enhance complementarity between the retardance profiles of the optical elements, and securing the combinations of relatively oriented optical elements together, to control or minimize the combined retardance of the stacked optical elements.

Abstract: Optical systems including lens assemblies and methods of imaging fields of view using such optical systems are disclosed. An optical system for imaging a two dimensional field includes a first lens assembly, a first scanning mirror, a second lens assembly, and a two dimensional image sensor. The first lens assembly has a first transform function whose output is within 0.1% of f1*(c1*?1+(1?c1)*sin(?1)) for any ray of light that traverses the first lens assembly from a center of an entrance pupil of the first lens assembly at an angle ?1 relative to an optical axis of the first lens assembly. f1 is a focal length of the first lens assembly, and ?0.5<c1<2.

Abstract: A metrology apparatus has an illumination source that directs collimated light to a reference surface and to an optical component having a test surface that is in parallel with the reference surface. A first imaging lens defines a Fourier transform plane for light reflected from the reference surface and the test surface. A spatial filtering element is actuable to a blocking position that blocks specular light at the transform plane. A second imaging lens forms, at an image plane, an image of the test surface. A sensor array generates image data from received light at the image plane.

Abstract: Pressure-sensing touch systems and methods are disclosed for sensing the occurrence of a touch event based on pressure applied at a touch location. The touch system includes a light-source system and a detector system operably adjacent respective input and output edges of a waveguide. Pressure at a touch location on the waveguide gives rise to a touch event causes the waveguide to bend or flex. The waveguide bending causes a change in the optical paths of light traveling by FTIR, causing the light distribution in the output light to change. The changes are detected and are used to determine whether a touch event occurred, as well as the time-evolution of the touch event. The changes in the output light can include polarization changes caused by birefringence induced in the waveguide by the applied pressure applied. Various detector configurations are disclosed for sensing the location and pressure of a touch event.

Abstract: The disclosure is directed to a coating consisting of a binary metal fluoride coating consisting a high refractive index metal fluoride layer on top of a substrate, a low refractive index metal fluoride layer on top of the high refractive index layer and layer of SiO2 or F—SiO2 containing 0.2 wt % to 4.5 (2000 ppm to 45,000 ppm) F on top of the low refractive index layer. In one embodiment the F content of F—SiO2 is in the range of 5000 ppm to 10,000 ppm F. The high index and low index materials are each deposited to a thickness of less than or equal to 0.9 quarter wave, and the capping material is deposited to a thickness in the range of 5 nm to 25 nm. The disclosure is also directed to optical elements having the foregoing coating and a method of making the coating.

Abstract: The disclosure is directed to a coating consisting of a binary metal fluoride coating consisting a high refractive index metal fluoride layer on top of a substrate, a low refractive index metal fluoride layer on top of the high refractive index layer and layer of SiO2 or F—SiO2 containing 0.2 wt % to 4.5 (2000 ppm to 45,000 ppm) F on top of the low refractive index layer. In one embodiment the F content of F—SiO2 is in the range of 5000 ppm to 10,000 ppm F. The high index and low index materials are each deposited to a thickness of less than or equal to 0.9 quarter wave, and the capping material is deposited to a thickness in the range of 5 nm to 25 nm. The disclosure is also directed to optical elements having the foregoing coating and a method of making the coating.

Abstract: Optical systems including lens assemblies and methods of imaging fields of view using such optical systems are disclosed. An optical system for imaging a two dimensional field includes a first lens assembly, a first scanning mirror, a second lens assembly, and a two dimensional image sensor. The first lens assembly has a first transform function whose output is within 0.1% of f1*(c1*?1+(1?c1)*sin(?1)) for any ray of light that traverses the first lens assembly from a center of an entrance pupil of the first lens assembly at an angle ?1 relative to an optical axis of the first lens assembly. f1 is a focal length of the first lens assembly, and ?0.5<c1<2.

Abstract: In a lithographic projection system, a corrective optic in the form of one or more deformable plates is mounted within telecentric image or object space for making one-dimensional or two-dimensional adjustments to magnification. The deformable plate, which can be initially bent under the influence of a preload, contributes weak magnification power that influences the magnification of the projection system by changing the effective focal length in object or image space. An actuator adjusts the amount of curvature through which the deformable plate is bent for regulating the amount of magnification imparted by the deformable plate.