Patents by Inventor Paul G. Kiely

Paul G. Kiely has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical emission spectroscopy control of gas flow in processing chambers
    Patent number: 11868147
    Abstract: A system may be configured to monitor an amount of a gas species in a processing chamber using Optical Emission Spectrometry. The gas measurement may be provided as feedback to a control process that generates a target setpoint for a gas flow controller into the process chamber. This real-time process may increase/decrease the flow rate of the gas in order to maintain a process deposition mode within a transition region between primarily metallic deposition and primarily compound deposition.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: January 9, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Philip DiGiacomo, Sunil Kumar Garg, Paul G. Kiely, Keith A. Miller, Rajat Agrawal
  • OPTICAL EMISSION SPECTROSCOPY CONTROL OF GAS FLOW IN PROCESSING CHAMBERS
    Publication number: 20220291702
    Abstract: A system may be configured to monitor an amount of a gas species in a processing chamber using Optical Emission Spectrometry. The gas measurement may be provided as feedback to a control process that generates a target setpoint for a gas flow controller into the process chamber. This real-time process may increase/decrease the flow rate of the gas in order to maintain a process deposition mode within a transition region between primarily metallic deposition and primarily compound deposition.
    Type: Application
    Filed: March 11, 2021
    Publication date: September 15, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Philip DiGiacomo, Sunil Kumar Garg, Paul G. Kiely, Keith A. Miller, Rajat Agrawal