Abstract: An MTPV thermophotovoltaic chip comprising a photovoltaic cell substrate, micron/sub-micron gap-spaced from a juxtaposed heat or infrared radiation-emitting substrate, with a radiation-transparent intermediate window substrate preferably compliantly adhered to the photovoltaic cell substrate and bounding the gap space therewith.

Abstract: A near-field energy conversion structure and method of assembling the same, utilizing a sub-micrometer “near field” gap between juxtaposed photocell infrared radiation receiver and heat emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure.

Abstract: A method of making a micron gap thermal photovoltaic device wherein at least one standoff is formed on a photovoltaic substrate, a sacrificial layer is deposited on the photovoltaic substrate and about the standoff, an emitter is attached to the standoff and has a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and the sacrificial layer is removed to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.

Abstract: A method of making a micron gap thermal photovoltaic device wherein at least one standoff is formed on a photovoltaic substrate, a sacrificial layer is deposited on the photovoltaic substrate and about the standoff, an emitter is attached to the standoff and has a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and the sacrificial layer is removed to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.

Abstract: Three magnetic substrates are provided, the first substrate forms the rotor and the other two form the outer stator. A series of spaced concentric grooves and spaced spiral grooves are formed in the central region of both faces of the first substrate. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves, forming a central wheel. A series of spaced serpentine grooves and generally radial grooves are formed on each active face of the other two substrates. A conductor is then deposited into the serpentine grooves, and a magnetic material is deposited into the generally radial grooves. The two outer substrates are then bonded against the first substrate such that the outer end of each magnetic path overlays a filled hole in the first substrate, creating the stator of an axial air gap reluctance motor.

Abstract: A process for fabricating elongated inductive components that have one or more conductors surrounded along their active length by a magnetic layer. A substrate is provided having one or more narrow, elongated deposition regions, each such region bordered on both elongated sides by elongated openings in the substrate, so that at least some of each such region is accessible along all sides. Conductors are provided on these regions. An insulator is deposited over the conductors. A magnetic layer is deposited over the insulator.

Abstract: This invention relates to the fabrication of planar inductive components whereby the design in cross-section describes a conductor surrounded by magnetic material along the length of the conductor; an electrical insulator is placed between the conductor and the magnetic material. Cases also apply where more than one independent conductor is used. The planar form allows integration of inductive components with integrated circuits. These inductive components can be embedded in other materials. They can also be fabricated directly onto parts.

Abstract: A micron gap thermo-photo-voltaic device including a photovoltaic substrate, a heat source substrate, and a plurality of spacers separating the photovoltaic substrate from the heat source substrate by a submicron gap. Each spacer includes an elongated thin-walled structure disposed in a well formed in the heat source substrate and having a top surface less than a micron above the heat source substrate. Also disclosed are methods of making the spacers.

Abstract: A rate gyroscope and accelerometer multisensor, and a process for fabricating the device. The device has an inner magnetically-suspended spinning wheel rotor, with outer stator portions adjacent both faces of the rotor. In one embodiment of the process, three substrates of magnetic material are provided. A first substrate is used to form the portion comprising the rotor. The other two substrates are used to form the outer stator portions. A series of spaced concentric grooves are formed in the central region of both faces of the first substrate. Outside of the grooves on both faces of the first substrate a series of spaced spiral grooves are formed. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves. A central wheel is formed, the wheel carrying the spaced concentric grooves and defining along its edge a series of spaced teeth.

Abstract: A method of making a micron gap thermal photovoltaic device wherein at least one standoff is formed on a photovoltaic substrate, a sacrificial layer is deposited on the photovoltaic substrate and about the standoff, an emitter is attached to the standoff and has a lower planar surface separated from the photovoltaic substrate by the sacrificial layer, and the sacrificial layer is removed to form a sub-micron gap between the photovoltaic substrate and the lower planar surface of the emitter.

Abstract: A hybrid wafer gyroscope includes a combination of micro-machined components and traditional electromechanical components to form a miniature gyroscope having a high degree of stability. The gyroscope includes a rotor, gimbal, flexures, and stop cutouts micro-machined out of one or more layers of silicon, forming a unitary, planar, and disk-shaped rotor subassembly, which spins about a drive shaft.

Abstract: This invention relates to the fabrication of planar inductive components whereby the design in cross-section describes a conductor surrounded by magnetic material along the length of the conductor; an electrical insulator is placed between the conductor and the magnetic material. Cases also apply where more than one independent conductor is used. The planar form allows integration of inductive components with integrated circuits. These inductive components can be embedded in other materials. They can also be fabricated directly onto parts.

Abstract: A low thermal strain flexure support for a micromechanical device includes a substrate; a micromechanical device having a rotational axis and a longitudinal axis; an anchor structure disposed on the substrate proximate the longitudinal axis of the micromechanical device; first and second support members extending outwardly oppositely from the anchor structure; and first and second flexures extending inwardly in the direction of the axis of rotation of the micromechanical device from the first and second support members, respectively, to the micromechanical device for suspending the micromechanical device from the substrate.

Abstract: A monolithic, micromechanical vibrating beam accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally collinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction collinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer.

Abstract: Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber.

Abstract: An accelerometer having one or more flexure stops for increasing the stiffness of the flexures when the accelerometer is subjected to relatively high acceleration. A wrap-around proof mass is suspended over a substrate by anchor posts and a plurality of flexures. In one embodiment, the proof mass has a rectangular frame including top and bottom beams extending between left and right beams and a central crossbeam extending between the left and right beams. Proof mass sense electrodes are cantilevered from the top, bottom and central beams and are interleaved with excitation electrodes extending from adjacent excitation electrode supports. Each of the flexure stops includes a pair of members extending along a portion of a respective flexure. Also described is a three axis accelerometer triad device and a dissolved wafer process for fabricating the devices described herein.

Abstract: A monolithic, micromechanical tuning fork gyroscope is fabricated from a unitary silicon substrate utilizing etch stop diffusions and selective anisotropic etching. A non-etched silicon structure is suspended over the selectively etched pit. The non-etched silicon structure includes at least first and second vibratable structures. Each vibratable structure is energizable to vibrate laterally along an axis normal to the rotation sensitive axis. The lateral vibration of the first and second vibratable structures effects simultaneous vertical movement of at least a portion of the non-etched silicon structure upon the occurrence of angular rotation of the gyroscope about the rotation sensitive axis. The vertical movement of the non-etched silicon structure is sensed, and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.

Abstract: A monolithic, micromechanical vibrating beam accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally collinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction collinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer.

Abstract: An improved process for fabricating micromechanical devices having movable members, such as gyros and accelerometers. A starting wafer includes an oxidized silicon wafer which has been wafer bonded to a second silicon wafer which has a thin N layer on a P substrate. The wafer is patterned, doped and etched in a series of process steps which include the deposition of epitaxial layers to configure critical device dimensions and geometry. Metallizations are deposited for electrical/electronic interconnections. The process includes an ability to integrate on-chip electronics on the silicon substrate. Alignment difficulties and thermal mismatch associated with prior art processes are minimized.

Abstract: A gimballed vibrating wheel gyroscope for detecting rotational rates in inertial space. The gyroscope includes a support oriented in a first plane and a wheel assembly disposed over the support parallel to the first plane. The wheel assembly is adapted for vibrating rotationally at a predetermined frequency in the first plane and is responsive to rotational rates about a coplanar input axis for providing an output torque about a coplanar output axis. The gyroscope also includes a post assembly extending between the support and the wheel assembly for supporting the wheel assembly. The wheel assembly has an inner hub, an outer wheel, and spoke flexures extending between the inner hub and the outer wheel and being stiff along both the input and output axes. A flexure is incorporated in the post assembly between the support and the wheel assembly inner hub and is relatively flexible along the output axis and relatively stiff along the input axis.