Patents by Inventor Paul Hendricus SCHEEPERS

Paul Hendricus SCHEEPERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240006147
    Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.
    Type: Application
    Filed: September 18, 2023
    Publication date: January 4, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Christiaan OTTEN, Christan TEUNISSEN, Paul Hendricus SCHEEPERS, Joseph Reinier MEIJER