Patents by Inventor Paul J. Tompkins

Paul J. Tompkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Variable annular illuminator for photolithographic projection imager
    Patent number: 5757470
    Abstract: The illumination of a photolithographic projection imager is given a variable annular intensity profile by using diverging and counter diverging elements that are movable relative to each other in the illumination path. An upstream element diverges the illumination into an annular configuration, the radius of which is set by the distance downstream to the counter diverging element. Convex and concave conical surfaces on the movable elements can accomplish this.
    Type: Grant
    Filed: August 17, 1995
    Date of Patent: May 26, 1998
    Assignee: General Signal Corporation
    Inventors: Paul G. Dewa, Paul F. Michaloski, Paul J. Tompkins, William N. Partlo
  • Variable annular illuminator for photolithographic projection imager
    Patent number: 5452054
    Abstract: The illumination of a photolithographic projection imager is given a variable annular intensity profile by using diverging and counter diverging elements that are movable relative to each other in the illumination path. An upstream element diverges the illumination into an annular configuration, the radius of which is set by the distance downstream to the counter diverging element. Convex and concave conical surfaces on the movable elements can accomplish this.
    Type: Grant
    Filed: November 21, 1994
    Date of Patent: September 19, 1995
    Assignee: General Signal Corporation
    Inventors: Paul G. Dewa, Paul F. Michaloski, Paul J. Tompkins, William N. Partlo