Abstract: A system coupleable to a heated wafer chuck control system provides an indication that the heated chuck is operating at a temperature outside of a desired operational range. An operational temperature circuit generates an operational temperature limit signal which is reflective of a selected limit for a heated wafer chuck. An input circuit configured for coupling to a heated wafer chuck control system provides a chuck temperature signal which is reflective of the actual measured temperature of the heated chuck. A comparator circuit coupled to the operational temperature circuit and the input circuit compares the limit signal to the chuck temperature signal and provides an output signal for generating a humanly-perceptible indication of the chuck temperature status, and an interlace circuit controls other aspects of the system for turning the chuck OFF. The system includes circuitry for verifying and calibrating the operation of the control board for the heated chuck.

Abstract: A system coupleable to a heated wafer chuck control system provides an indication that the heated wafer chuck is operating at a temperature outside of a desired operational temperature range for the chuck. The system comprises: an operational temperature circuit for generating an operational temperature limit signal. The operational temperature limit signal is reflective of a selected operational temperature limit for a heated wafer chuck. An input circuit configured for coupling to a heated wafer chuck control system provides a chuck temperature signal which is reflective of the actual measured temperature of the heated chuck. A comparator circuit coupled to the operational temperature circuit and the input circuit compares the operational temperature limit signal to the chuck temperature signal and provides an output signal.

Abstract: A temperature control system for controlling the temperature of chemicals disposed in bottles. The temperature control system includes a temperature control device that controls the temperature of a liquid. The liquid circulates through a jacket. A bottle may easily be placed into the jacket such that the bottle sits on a weighing device. The circulation of fluid through the jacket and the temperature control device allows for the temperature of the bottle to be controlled. A bottle retainer that is attached to the jacket by a floating coupling mechanism attaches to the bottle. An emergency shut-off device is then coupled to the bottle. The floating coupling mechanism prevents the rotation of the bottle during operation of the emergency shut-off device. The floating coupling mechanism allows the bottle to float within the jacket such that the weight of the bottle may be determined. This allows for the amount of chemicals in the bottle to be determined accurately.

Abstract: A dual exhaust controller for maintaining isolation between the flows of two different gases in a chamber. The controller includes first and second gas input valves connected between respective first and second sources of different gases and a processing chamber. A pump is fluidly connected to the chamber for exhausting gases therefrom and has first and second gas exhaust valves connected to an outlet of the pump. A gas flow control interlocks the signals operating the gas input valves with the states of first and second gas exhaust valves which exhaust the respective first and second gases from the chamber, so that the different gases are exhausted independently.