Abstract: Optical components may be aligned for transverse-optical coupling by: fabricating a first optical component on a substrate; fabricating an alignment member on the substrate suitably positioned relative to the first optical component; and assembling a second optical component onto the alignment member, thereby establishing transverse optical coupling between the optical components. The substrate may preferably be substantially planar. The alignment member may mechanically engage the second optical component so as to accurately establish and stably maintain transverse optical coupling. The first optical component and the alignment member may preferably be fabricated on the substrate using precision spatially selective materials processing techniques. Transverse optical coupling between two optical components may be stably maintained by substantially embedding transverse-coupled portions of the components in a substantially solid substantially transparent low-index medium.

Abstract: Optical components may be aligned for transverse-optical coupling by: fabricating a first optical component on a substrate; fabricating an alignment member on the substrate suitably positioned relative to the first optical component; and assembling a second optical component onto the alignment member, thereby establishing transverse optical coupling between the optical components. The substrate may preferably be substantially planar. The alignment member may mechanically engage the second optical component so as to accurately establish and stably maintain transverse optical coupling. The first optical component and the alignment member may preferably be fabricated on the substrate using precision spatially selective materials processing techniques. Transverse optical coupling between two optical components may be stably maintained by substantially embedding transverse-coupled portions of the components in a substantially solid substantially transparent low-index medium.

Abstract: An optically based resonating sensor useful for detecting and discriminating specified substances present in the environment is provided. The resonating sensor comprises a light source and a coupler adapted to allow light to pass from the light source to a resonator wherein the light is stored for a specified period of time. The resonator is coupled to the coupler such that some portion of the light passing through the coupler enters the resonator and some portion of the light resonating within the resonator exits the resonator to the coupler. The outer surface of the resonator is modified such that the interaction of the modified outer surface of the resonator with a specified substance in the environment alters some characteristic of the light flowing through the sensor system. A detector is arranged to observe and detect the interactions between the modified outer surface and the light flowing through the system.

Abstract: A suspended p-GaN membrane is formed using photochemical etching which membrane can then be used in a variety of MEMS devices. In the illustrated embodiment a pump is comprised of the p-GaN membrane suspended between two opposing, parallel n-GaN support pillars, which are anchored to a rigid substrate below the pillars. The p-GaN membrane bows upward between the pillars in order to relieve stress built up during the epitaxial growth of membrane. This bowing substantially increases the volume of the enclosed micro-channel defined between membrane and substrate below. The ends of membrane are finished off by a gradual transition to the flat underlying n-GaN layer in which fluidic channels may also be defined to provide inlet and outlet channels to microchannel. A traveling wave or sequential voltage applied to the electrodes causes the membrane to deform and provide a peristaltic pumping action in the microchannel.

Abstract: A suspended p-GaN membrane is formed using photochemical etching which membrane can then be used in a variety of MEMS devices. In the illustrated embodiment a pump is comprised of the p-GaN membrane suspended between two opposing, parallel n-GaN support pillars, which are anchored to a rigid substrate below the pillars. The p-GaN membrane bows upward between the pillars in order to relieve stress built up during the epitaxial growth of membrane. This bowing substantially increases the volume of the enclosed micro-channel defined between membrane and substrate below. The ends of membrane are finished off by a gradual transition to the flat underlying n-GaN layer in which fluidic channels may also be defined to provide inlet and outlet channels to microchannel. A traveling wave or sequential voltage applied to the electrodes causes the membrane to deform and provide a peristaltic pumping action in the microchannel.

Abstract: A proximity lithography device using a modified electric field. In the preferred embodiment, the modified electric field is formed by illuminating a tip of a scanning probe in close proximity of the resist surface with a laser. In an alternate embodiment, the modified electric field is formed by positioning a tip of a scanning probe within close proximity of the resist surface, where illumination from a laser is in total internal reflection within the resist. The proximity of the tip to the resist surface creates a tunneling effect and forms the modified electric field. The modified electric field alters the resist for lithographic patterning.

Abstract: A proximity lithography device using a modified electric field. In the preferred embodiment, the modified electric field is formed by illuminating a tip of a scanning probe in close proximity of the resist surface with a laser. In an alternate embodiment, the modified electric field is formed by positioning a tip of a scanning probe within close proximity of the resist surface, where illumination from a laser is in total internal reflection within the resist. The proximity of the tip to the resist surface creates a tunneling effect and forms the modified electric field. The modified electric field alters the resist for lithographic patterning.