Abstract: A beam alignment system and method for aligning a first radiation beam with respect to a second radiation beam as these beams share a desired optical path. Beam steering means, such as a galvonometer controlled mirror, steer the alignment of the first beam as it enters the shared optical path. Detection means are employed to sense the relative alignment between the first and second beams as they travel through the shared path. This sensed alignment is compared to a desired alignment, and a position error signal is generated to indicate the error therebetween. The position error signal, in turn, is used to steer the galvonometer controlled mirror in order to force the beam alignment error between the two beams to zero.

Abstract: A beam alignment signal processing system wherein a true beam position error signal is generated regardless of beam intensity. This beam position error signal is used within a beam alignment system that maintains a desired alignment between first and second beams traveling in parallel along a desired optical path. A detector senses the position of the beams as the beams (or portions of the beams) are directed onto a surface thereof. The detector generates a set of position signals that indicate the position at which a beam, or at which an energy centroid associated with a plurality of beams, falls upon the detector surface. A first set of position signals is generated corresponding to the position of the first beam on the detector surface with the second beam turned off. These signals are stored in signal storage means. The second beam is turned back on, and a second set of position signals is generated corresponding to the position of the centroid of the first and second beams on the detector surface.