Patents by Inventor Paul Markoff Johnson

Paul Markoff Johnson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for multi-target sputtering
    Patent number: 6635154
    Abstract: Sequential sputtered film deposition of distinct materials on a workpiece is obtained with discrete targets composed of such distinct materials disposed on separate area portions of a common cathode/heatsink. Sputtering without cross contamination of the deposited films is enabled during an interval of relative motion between the target and workpiece or in an indexed static relative disposition, wherein the workpiece projection is entirely proximate one such portion to deposit the respective layer.
    Type: Grant
    Filed: November 3, 2001
    Date of Patent: October 21, 2003
    Assignee: Intevac, Inc.
    Inventors: Paul Markoff Johnson, Norman H. Pond, Robert Ruck, Nathan Fo
  • Method and apparatus for multi-target sputtering
    Publication number: 20030085114
    Abstract: Sequential sputtered film deposition of distinct materials on a workpiece is obtained with discrete targets composed of such distinct materials disposed on separate area portions of a common cathode/heatsink. Sputtering without cross contamination of the deposited films is enabled during an interval of relative motionbetween the target and workpiece or in an indexed static relative disposition, wherein the workpiece projection is entirely proximate one such portion to deposit the respective layer.
    Type: Application
    Filed: November 3, 2001
    Publication date: May 8, 2003
    Inventors: Paul Markoff Johnson, Norman H. Pond, Robert Ruck, Nathan Fo