Patents by Inventor PAUL MAYRHOFER

PAUL MAYRHOFER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputter target and method for producing a sputter target
    Patent number: 11767587
    Abstract: A target for use in a physical vapor deposition process includes a matrix composed of a composite material selected from the group consisting of aluminum-based material, titanium-based material and chromium-based material and all combinations thereof. The matrix is doped with doping elements and the doping elements are embedded as constituents of ceramic compounds or aluminum alloys in the matrix. The doping elements are selected from the group of the lanthanides: La, Ce, Nb, Sm and Eu. A process for producing such a target and a use of such a target in a physical vapor deposition process are also provided.
    Type: Grant
    Filed: February 19, 2018
    Date of Patent: September 26, 2023
    Assignee: Plansee Composite Materials GmbH
    Inventors: Peter Polcik, Szilard Kolozsvari, Paul Mayrhofer, Helmut Riedl
  • SPUTTER TARGET AND METHOD FOR PRODUCING A SPUTTER TARGET
    Publication number: 20190368029
    Abstract: A target for use in a physical vapor deposition process includes a matrix composed of a composite material selected from the group consisting of aluminum-based material, titanium-based material and chromium-based material and all combinations thereof. The matrix is doped with doping elements and the doping elements are embedded as constituents of ceramic compounds or aluminum alloys in the matrix. The doping elements are selected from the group of the lanthanides: La, Ce, Nb, Sm and Eu. A process for producing such a target and a use of such a target in a physical vapor deposition process are also provided.
    Type: Application
    Filed: February 19, 2018
    Publication date: December 5, 2019
    Inventors: PETER POLCIK, SZILARD KOLOZSVARI, PAUL MAYRHOFER, HELMUT RIEDL