Abstract: Described herein are nanoribbon transistors and processes for forming nanoribbon transistors that include a nitride liner to protect the channel material during an oxide anneal. An oxide may be used to fill trenches between stacks of nanoribbons; the oxide is annealed, and then the oxide is recessed, forming isolation regions. Source and drain regions are formed over the isolation regions. In the resulting devices, the isolation regions have a liner layer that includes nitrogen. An additional oxide liner may be around the nitride liner.

Abstract: Devices, transistor structures, systems, and techniques are described herein related to gate all around field effect transistors having a stack of nanoribbons (i.e., semiconductor structures) contacted by epitaxial source and drain structures at opposite ends of the nanoribbons. The transistors include a gate structure vertically between the nanoribbons. The nanoribbons are doped at their opposing ends and/or gaps are laterally between the gate structure and the source and drain structures.

Abstract: Integrated circuit (IC) devices having dielectric spacers between parallel channel structures (e.g., of nanoribbons, nanowires, etc.). A transistor structure may have first and second channel layers between source and drain bodies, a gate stack with a gate metal and gate dielectric between the channel layers, and a dielectric spacer between the channel layers and between the gate dielectric and one of the source and drain bodies. The dielectric spacer may have a significant (or minimal) curvature such that a width of the dielectric spacer between the channel layers is much greater (or not much greater) than widths of the dielectric spacer at the channel layers or than a minimum distance separating the gate metal between the channel layers from one of the source and drain bodies. An added or altered etch may remove sacrificial dummy gate material from between the channel layers and the gate side of the dielectric spacer.

Abstract: An integrated circuit (IC) device having complementary dielectric plugs separating gate electrodes. An IC device includes a first gate-cut plug of silicon and nitrogen between and in contact with two gate structures of transistors of a first conductivity type and a second gate-cut plug between and in contact with two gate structures of transistors of a second conductivity type, complementary to the first conductivity type, and the second gate-cut plug has within a liner of silicon and nitrogen either an airgap or a dielectric of silicon and oxygen. Pairs of gate structures of transistors having both of the first and second conductivity types are separated by first and second gate-cut plugs.

Abstract: Integrated circuit (IC) devices having contacts to source and drain bodies in narrow trenches. An IC device includes first and second source or drain bodies in first and second transistors, first and second contact structures on the first and second source or drain bodies, and a dielectric between the first and second source or drain bodies and between the first and second metallization structures, and the dielectric may consist of substantially pure silicon, for example, amorphous silicon. The dielectric includes silicon and is devoid of oxygen and nitrogen. The contact structures may be formed using an etch of the silicon dielectric in the contact trenches that is selective to other dielectrics.

Abstract: Integrated circuit (IC) devices having gate-all-around field-effect transistors with nanoribbon channels through gate electrodes. An IC device has a stack of nanoribbon channels through a gate electrode, and the gate electrode has uniform gate thicknesses of gate metal and dielectric layers between, over, and under each of the nanoribbons. The nanoribbons extend between pairs of gate spacers to couple source and drain bodies, with pairs of matching gate spacers over and under each of the nanoribbons. A pair of second gate spacers are on and over an uppermost pair of the first gate spacers. A sacrificial cap layer is deployed over an uppermost of the channel layers during processing, and end portions of cap layer are retained as the second gate spacers.

Abstract: Isolation structures between transistors in integrated circuit (IC) devices. An IC device includes transistors coupled to an interconnect network, and between the transistors a dielectric structure with a wider width away from the interconnect network and a narrower width nearer the interconnect network. Dielectric structures with wider back-side widths may separate gate electrodes and/or source and drain contacts of the transistors. The dielectric structures may be formed by etching an opening between metallization structures of the transistors from a back side of the device substrate and by depositing liner and fill dielectrics over the back-side opening.

Abstract: Integrated circuit (IC) devices having transistors with electrodes and/or contacts in close proximity. An IC device includes a transistor structure having a channel between a source and a drain, a gate electrode over the channel region, and contacts on the source and the drain, and the electrode and contacts extend past an edge or sidewall of the channel different distances, that is, with unaligned ends. One or both of the source and drain contacts may extend past the gate electrode. The gate electrode may extend past one or both of the source and drain contacts. The source and drain contacts and the gate electrode may be formed to unaligned dimensions or may be disaligned by trimming.

Abstract: Integrated circuit structures having deep via bar width tuning are described. For example, an integrated circuit structure includes a plurality of gate lines extending over first and second semiconductor nanowire stack channel structures or fin structures. A plurality of trench contacts is intervening with the plurality of gate lines. A conductive structure is between the first and second semiconductor nanowire stack channel structures or fin structures, the conductive structure having a first width in a first region and a second width in a second region between the first and second semiconductor nanowire stack channel structures or fin structures, the second width different than the first width.

Abstract: Isolation breaks between logic cells in integrated circuit (IC) devices. A source-drain trench between adjacent channel regions includes a pair of source or drain semiconductor bodies, a first of the source or drain bodies in the source-drain trench is connected to a first of the channel regions, a second of the source or drain bodies in the source-drain trench is connected to a second of the channel regions, and a dielectric isolation is in the source-drain trench and between the pair of source or drain bodies. The dielectric isolation may include a void between layers or sidewalls of dielectric. The pair of source or drain bodies may include highly conductive, metallized layers in contact with the dielectric isolation.

Abstract: An IC device may have activation regions and an isolation region between the active regions. An active region may include one or more transistors. The IC device includes gates that are in parallel. Some of the gates are in the active regions. The other gates are in the isolation region. A source or drain region may be formed between a gate in the isolation region and a gate in a transistor in the first direction. The IC device may include one or more semiconductor structures that extend across a gate in a transistor, and the semiconductor structures may constitute a channel region of the transistor. The IC device may also include one or more semiconductor structures that extend across an individual gate in the isolation region. An insulative structure may be formed between two gates in the isolation region. The insulative structure may be over the source or drain region.

Abstract: Disclosed herein are IC structures with transistor gate-channel arrangements for SRAM, and related methods and devices. Example IC structure may include a memory cell with a plurality of transistors including transistors of a first type and transistors of a second type (e.g., the first type may be an N-type and the second type may be a P-type, or vice versa), an individual transistor comprising a transistor gate-channel arrangement that includes a channel material and a transistor gate stack, and the transistor gate stack comprising a gate electrode material and a high-k dielectric between the gate electrode material and the channel material. The transistor gate-channel arrangement of at least one transistor of the first type further includes a dipole material or a halogen (e.g., fluorine), which are absent in the transistor gate-channel arrangements of all of the transistors of the second type.

Abstract: Fabrication methods for integrated circuit (IC) structures and devices including asymmetric source and drain regions are described herein. In one example, an integrated circuit structure includes a transistor including a first region and a second region, where one of the first region and the second region is a source region of the transistor, and another of the first region and the second region is a drain region of the transistor, and where the first and second regions have different widths. In one example, the first region has a first width and the second region has a second width that is smaller than the first width.

Abstract: Fabrication methods for integrated circuit (IC) structures and devices with different nanoribbon thicknesses are disclosed. In one example, an IC structure includes a stack of nanoribbons stacked above one another over the support, including a first nanoribbon with a first channel region and a second nanoribbon with a second channel region, where the first channel region has a first thickness and the second channel region has a second thickness, and where the first thickness of the first channel region is different (e.g., greater) than the second thickness of the second channel region.

Abstract: Integrated circuit structures having deep via bar width tuning are described. For example, an integrated circuit structure includes a plurality of gate lines extending over first and second semiconductor nanowire stack channel structures or fin structures. A plurality of trench contacts is intervening with the plurality of gate lines. A conductive structure is between the first and second semiconductor nanowire stack channel structures or fin structures, the conductive structure having a first width in a first region and a second width in a second region between the first and second semiconductor nanowire stack channel structures or fin structures, the second width different than the first width.

Abstract: Multiple voltage threshold integrated circuit structures with local layout effect tuning, and methods of fabricating multiple voltage threshold integrated circuit structures with local layout effect tuning, are described. For example, an integrated circuit structure includes a first fin structure or vertical arrangement of horizontal nanowires. A second fin structure or vertical arrangement of horizontal nanowires is laterally spaced apart from the first fin structure or vertical arrangement of horizontal nanowires. An N-type gate structure is over the first fin structure or vertical arrangement of horizontal nanowires. A P-type gate structure is over the second fin structure or vertical arrangement of horizontal nanowires, the P-type gate structure in contact with the N-type gate structure with a PN boundary between the P-type gate structure and the N-type gate structure.

Abstract: Integrated circuit structures having reduced local layout effects, and methods of fabricating integrated circuit structures having reduced local layout effects, are described. For example, an integrated circuit structure includes an NMOS region including a first plurality of fin structures or vertical stacks of horizontal nanowires, and first alternating gate lines and trench contact structures over the first plurality of fin structures or vertical stacks of horizontal nanowires. The integrated circuit structure also includes a PMOS region including a second plurality of fin structures or vertical stacks of horizontal nanowires, and second alternating gate and trench contact structures over the second plurality of fin structures or vertical stacks of horizontal nanowires. A gate line is shared between the NMOS region and the PMOS region, and a trench contact structure is shared between the NMOS region and the PMOS region.

Abstract: An integrated circuit (IC) device includes a stripe of material perpendicular to, and spanning between, semiconductor structures with multiple widths, and the stripe is between transistors with channel regions of differing widths in the semiconductor structures. The material stripes cover transition portions between different widths of the semiconductor structures. The semiconductor structures may be channel structures of different types, including groups of fins or nanoribbons. Channel regions of differing widths may include more or fewer fins or narrower or wider nanoribbons. The channel regions may have alternating conductivity types, n- and p-type.

Abstract: An IC device may have layout with reduced N-P boundary effect. The IC device may include two rows of transistors. The first row may include one or more P-type transistors. The second row may include N-type transistors. The gate electrode of a P-type transistor may include different conductive materials from the gate electrode of a N-type transistor. Each P-type transistor in the first row may be over a N-type transistor in the second row and contact the N-type transistor in the second row. For instance, the gate of the P-type transistor may contact the gate of the N-type transistor. Vacancy diffusion may occur at the boundary of the P-type transistor and the N-type transistor, causing N-P boundary effect. At least one or more other N-type transistors in the second row do not contact any P-type transistor, which can mitigate the N-P boundary effect in the IC device.

Abstract: An IC device may include an array of transistors. The transistors may have separate gate electrodes. A gate electrode may include polysilicon. The gate electrodes may be separated from each other by one or more electrical insulators. The separated gate electrodes have shorter lengths, compared with connected gate electrodes, which can optimize the performance of the IC device due to local layout effect. Also, the IC device may include conductive structures crossing the support structures of multiple transistors. Such conductive structures may cause strain in the IC device, which can boost the local layout effect. The conductive structures may be insulated from a power plane. Alternatively or additionally, the IC device may include dielectric structures, which may be formed by removing gate electrodes in some of the transistors and providing a dielectric material into the openings. The presence of the dielectric structures can further boost the local layout effect.