Patents by Inventor Paul R. Bernatis

Paul R. Bernatis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPOSITION FOR CLEANING SUBSTRATES POST-CHEMICAL MECHANICAL POLISHING
    Publication number: 20130053291
    Abstract: A semiconductor processing composition and method for cleaning semiconductor wafers post chemical mechanical polishing comprising a phosphorous base and optionally at least one surfactant.
    Type: Application
    Filed: August 22, 2011
    Publication date: February 28, 2013
    Inventors: Atsushi Otake, Paul R. Bernatis, Cass X. Shang