Patents by Inventor Paul R. Proctor

Paul R. Proctor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming substrate contact trenches and isolation trenches using anodization for isolation
    Patent number: 5217920
    Abstract: A method of fabricating a semiconductor structure includes providing a substrate having at least one layer formed thereon. At least two trenches are formed through the layer and into the substrate wherein at least one trench is for isolation and at least one trench is for making contact to the substrate. After a trench liner is formed on the sidewalls of the trenches, the trenches are filled with doped semiconductor material. The doped semiconductor material in the trench for isolation is then anodized. After the anodization, the anodized trench fill material is oxidized.
    Type: Grant
    Filed: June 18, 1992
    Date of Patent: June 8, 1993
    Assignee: Motorola, Inc.
    Inventors: Robert J. Mattox, Paul R. Proctor, Syd R. Wilson