Patents by Inventor Paul Roger Edwards

Paul Roger Edwards has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating semiconductor devices with a multi-role facilitation layer
    Patent number: 7566579
    Abstract: A method of growing semiconductor materials in the Indium, Aluminium, Gallium Nitride (InAlGaN) material system and to devices made therefrom, in particular optical devices in the ultraviolet to green region of the visible spectrum. Certain optical devices, for example Vertical Cavity Surface Emitting Lasers (VCSELs) require great precision in the thickness of certain semiconductor layers. One aspect of the present invention provides a gallium-rich group III nitride layer (200, 201) and an adjacent layer of AlxInyGa1-x-yN layer (202). The AlxInyGa1-x-yN layer (202) acts as a fabrication facilitation layer and is selected to provide a good lattice match and high refractive index contrast with the gallium-rich group III nitride layer (200, 201). The high refractive index contrast permits in-situ optical monitoring. The extra layer (202) can be used as an etch marker or etch stop layer in subsequent processing and may be used in a lift-off process.
    Type: Grant
    Filed: November 4, 2005
    Date of Patent: July 28, 2009
    Assignee: University of Strathclyde
    Inventors: Ian Michael Watson, Martin Dawson, Erdan Gu, Robert William Martin, Paul Roger Edwards