Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.

Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.

Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

Abstract: A seatbelt usage sensing apparatus for use with a vehicle which includes a seat assembly, an occupant sensor, a seatbelt sensor, and a warning signal generator. The seat assembly includes a seat cushion that is adapted to be occupied by a seat occupant in an occupied configuration. The seat assembly also includes a seatbelt assembly which has a seatbelt webbing and a seatbelt fastening member. The seatbelt assembly is moveable between fastened and unfastened configurations. In the unfastened configuration, the seatbelt fastening member is removed from secure engagement with the seatbelt webbing. The warning signal generator can generate and transmit a seatbelt warning signal when the occupant sensor determines that the seat cushion is in the occupied configuration and the seatbelt sensor determines that the seatbelt assembly is in the unfastened configuration. The seatbelt warning signal is transmitted substantially exterior relative to an interior seating compartment of the vehicle.

Abstract: A method for forming moveable features suspended over a substrate is described, wherein a cavity beneath the moveable feature is first formed using a liquid etchant applied through one or more release holes. After formation of the cavity, the outline of the moveable feature is formed using a dry etch process. Since the moveable feature is free to move upon its formation using the dry etch process, no stiction issues arise using the systems and methods described here.

Abstract: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about the anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

Abstract: A MEMS hysteretic thermal device may have two passive beam segments driven by a current-carrying loop coupled to the surface of a substrate. The first beam segment is configured to move in a direction having a component perpendicular to the substrate surface, whereas the second beam segment is configured to move in a direction having a component parallel to the substrate surface. By providing this two-dimensional motion, a single MEMS hysteretic thermal device may by used to close a switch having at least one stationary contact affixed to the substrate surface.

Abstract: A tortilla cooking apparatus comprising inner pillars arranged to support one or more tortillas in an inverted U-shape and to prevent the tortillas from closing during cooking. Outer pillars are included on the outside of the inner pillars and arranged to prevent the tortillas from opening during cooking. The inner and outer pillars positioned so that a respective one of the U-shape sides of each of the supported tortillas is between one of the inner pillars and one of the outer pillars. A method for cooking a tortilla comprises supporting the tortilla in an inverted U-shape such that the tortilla does not open or close during cooking. A liquid is held near the tortilla. The tortilla and liquid are heated to cook the tortilla and to evaporate the water with the evaporated liquid moisturizing the tortilla during cooking.

Abstract: A MEMS thermal device is made in a smaller size by decreasing the distance that the two cantilevered portions, a spring cantilever and a latch cantilever, of the device must travel. The smaller distance is accomplished by positioning the two contact surfaces of the spring cantilever and the latch cantilever adjacent to each other in the quiescent state of the switch. When the switch is closed, the spring cantilever moves laterally to clear the contact surface of the latch cantilever, and then the latch cantilever moves its contact surface into position. To close the switch, the spring cantilever is allowed to relax and return to nearly its original position, except for the presence of the latch contact surface. When the spring cantilever is allowed to relax, it stays in the closed position because of friction or because of an angled shape of the contact surfaces.

Abstract: A multiple switch MEMS structure has a higher resistance, higher durability switch arranged in parallel with a lower resistance, less durable switch. By closing the higher resistance, high durability switch before the lower resistance, less durable switch, the lower resistance, less durable switch is protected from voltage transients and arcing which may otherwise damage the lower resistance, less durable switch. By appropriate selection of dimensions and materials, the high resistance, high durability switch may be assured to close first, as well as open first, thereby also protecting the lower resistance, less durable switch from voltage transients upon opening as well as upon closing.

Abstract: A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis accelerometer which is sensitive to an acceleration applied in any direction Damping plates may be added to the accelerometers to reduce unwanted motion.

Abstract: A composite wafer for fabricating MEMS devices is provided with a plurality of antistiction bumps, buried under a device layer of the composite wafer. The antistiction bumps are prepared lithographically, by patterning an antistiction material prior to the assembly of the composite wafer.

Abstract: A microfabricated cross flow filter may have multiple filtration stages. The filtration stages may include microfabricated filter barriers and gaps created in a substrate, thereby allowing very tight tolerances in the filter barrier and gap dimensions to be maintained. Using the microfabrication techniques, the filter barriers can be made having arbitrary shapes, and arranged at an angle or curved with respect to the flow direction, making the pressure drop across the filtration stage more uniform in the cross flow direction.

Abstract: A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electromechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract: A micromechanical particle sorting chip uses laser light directed through at least one of a reflective and refractive surface to come to a focus in an optically transparent layer. The laser light impinges on a particle of interest, causing it to fluoresce. Upon detecting the fluorescence, a micromemchanical actuator is activated, which directs the particle of interest into one of a plurality of possible exit paths.

Abstract: The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

Abstract: Apparatus for the acquisition and pre-processing of electrocardiographic data.It comprises elements for multiplexing (1) and pre-amplifying (2) signals picked up by the 7 electrodes, in a Frank network (3), of three fixed gain amplifiers (4, 5, 6), a 12-bit analog-to-digital converter (8), a device (9) for digit compression of the signals, a micro-processor (11) and display elements (20), all these elements being assembled in a portable unit.Application to the processing of vectocardiographic data.

Abstract: The apparatus comprises a massive body accurately maintained at 37.degree. and having a through horizontal bore in which are disposed in succession a bulb, a first concentrating lens, a test tube containing the sample, an interchangeable optical filter, a second concentrating lens and a photo-electric cell. The test tube is disposed in a blind vertical bore of the body and it contains a small stirrer bar resting on its bottom and made of a magnetic material. A permanent magnet, adapted to be operatively associated with the stirrer bar is rotated below the body, co-axially to the bar, by an electric motor at one of two accurately controlled speeds. The output of the cell is amplified and applied to one inlet of a differential amplifier the other inlet of which receives the output of a memory wherein the response of the cell has been registered at the beginning of a test. The outlet signal from the differential amplifier starts therefore from zero and may be applied to a usual graphically recording apparatus.