Patents by Inventor Paul S. Gustafson

Paul S. Gustafson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Resist oxidizer with catalytic reactor
    Patent number: 5273723
    Abstract: A catalytic reactor is used in the exhaust tract of a high pressure, high flow rate ozone asher to prevent resist deposit fouling of the exhaust tract.
    Type: Grant
    Filed: May 14, 1992
    Date of Patent: December 28, 1993
    Assignee: Fusion Systems Corporation
    Inventor: Paul S. Gustafson