Abstract: A modular stocker for storage and retrieval of semi-conductor wafer cassettes that minimizes system down time for repair of replacement of components. The modular stocker is comprised of a rectangular or half cylindrical enclosure formed by vertical beams secured by a plurality of horizontal joists. A pick up and transfer device for storing and retrieving semi-conductor wafer cassettes in the stocker has a linear arm and a paddle or gripper for picking up the cassettes. The linear arm and paddle or gripper are driven vertically, horizontally, and rotationally by a plurality of servo motors which are mounted on a detachable chassis that forms one side of the stocker. Quick disconnect fasteners at the corners of the chassis and bottom mounted casters allow the entire chassis with the pick up and transfer device to be disconnected and rolled out of the stocker for repair or replacement. The stocker electronics are mounted on removable panels that slide in or out of the stocker on rails.

Abstract: A fluid meter particle isolating system having a tortuous path formed between a pair of walls with an inlet and an outlet. The inlet is open to a contaminant-free (clean) zone while an outlet is open to a particle generating contaminated (dirty) zone. The walls include partitions that form a tortuous path separating it into a plurality of chambers. An impeller constructed of a plurality of open cells forms a piston-like structure is provided in the tortuous path and has an axis of motion parallel to the walls. Each vessel is offset axially and has four walls and a bottom surface contoured to provide a transition from one cell to the next through an exit port providing a continuous flow from the vessel in the first cell sequentially to adjacent cells to an exit port in the last vessel in the last cell.

Abstract: A semiconductor wafer cassette storage cabinet or stocker having a retrieval and transfer system constructed in the form of a kiosk encircling a pick-up and transfer apparatus. The structure is formed of a plurality of identical sections having wall panels and roof panels joined together to form a nearly semi-circular enclosure around the pick-up and transfer apparatus. Each section has multiple level input/output ports adjacent to each other with a shelf for supporting a semiconductor wafer cassette. Shelves at the input/output ports are constructed of rails supporting drive rollers and a photodetector to activate the drive rollers to fill an output port whenever a cassette has been retrieved and transferred. One embodiment with five identical sections can store and retrieving up to twenty semiconductor wafer cassettes while an optional embodiment with seven identical sections can store twenty-eight semiconductor wafer cassettes.

Abstract: A fluid meter particle isolating system having a tortuous path formed between a pair of walls with an inlet and an outlet. The inlet is open to a contaminant-free (clean) zone while an outlet is open to a particle generating contaminated (dirty) zone. The walls include partitions that form a tortuous path separating it into a plurality of chambers. An impeller constructed of a plurality of open cells forms a piston-like structure is provided in the tortuous path and has an axis of motion parallel to the walls. Each vessel is offset axially and has four walls and a bottom surface contoured to provide a transition from one cell to the next through an exit port providing a continuous flow from the vessel in the first cell sequentially to adjacent cells to an exit port in the last vessel in the last cell.

Abstract: A semiconductor wafer cassette storage cabinet or stocker having retrieval and transfer system constructed in the form of a kiosk encircling a pick-up and transfer apparatus. The structure is formed of a plurality of identical sections having walls and a roof joined together to form a nearly semi-circular enclosure around the pick-up and transfer apparatus. Each section has multiple level input/output ports adjacent to each other with a shelf for supporting a semiconductor wafer cassette. One embodiment has five identical sections for storing and retrieving up to twenty 300 mm semiconductor wafer cassettes while an optional embodiment has seven identical sections for storing up to twenty-eight 180 mm semiconductor wafer cassettes. The system can also be in a multi-level arrangement of two kiosk stockers, one above the other at separate levels with the pick-up and transfer apparatus constructed to travel from the lower kiosk stocker to the upper kiosk stocker.

Abstract: A fluid meter particle isolating system having a tortuous path formed between a pair of walls with an inlet and an outlet. The inlet is open to a contaminant-free (clean) zone while an outlet is open to a particle generating contaminated (dirty) zone. The walls include partitions that form a tortuous path separating it into a plurality of chambers. An impeller constructed of a plurality of open cells forms a piston-like structure is provided in the tortuous path and has an axis of motion parallel to the walls. Each vessel is offset axially and has four walls and a bottom surface contoured t provide a transition from one cell to the next through an exit port providing a continuous flow from the vessel in the first cell sequentially to adjacent cells to an exit port in the last vessel in the last cell.

Abstract: A fluid meter particle isolating system having a tortuous path formed between a pair of walls with an inlet and an outlet. The inlet is open to a contaminant-free (clean) zone while an outlet is open to a particle generating contaminated (dirty) zone. The walls include partitions that form a tortuous path separating it into a plurality of chambers. An impeller constructed of a plurality of open cells forming a piston-like structure is provided in the tortuous path and has an axis of motion parallel to the walls. Each cell forms a vessel for transmitting fluid media under a low pressure gradient from a clean zone toward a contaminated zone to prevent particles generated in the contaminated zone from migrating to the clean zone. Each vessel is formed by the four walls of each cell having a bottom surface contoured to provide a transition from one cell to the next through an exit port.

Abstract: A safety valve for fitting into a compressed gas cylinder to terminate gas flow from the cylinder when a primary gas valve attached to the cylinder port of the cylinder is deflected or severed. The safety valve is independently supported in the cylinder port below the location of the primary gas valve. A threaded housing having a channel for the passage of gas to and from the cylinder is threaded into the cylinder port below the location of the primary gas valve. A poppet seat is provided in the housing. A tubular portion of the threaded housing extends up and fits snugly into the gas passage of the primary gas valve. A cylindrical housing having apertures for the passage of gas is attached to the threaded housing. A poppet is provided in the cylindrical housing, which is biased into the poppet seat by a helical spring. The poppet is held off of the poppet seat by means of a frangible element.

Abstract: A safety valve device for a compression gas cylinder to shut off gas flow at the tank port of the cylinder when downstream gas flow control apparatus is structurally distrupted is set forth which includes a housing having a conduit therethrough for the passage of gas where the housing is adapted for fitting into the tank port of the cylinder. A poppet seat is located in the conduit and is in a fixed position relative to the tank port. A poppet which passes through the poppet seat is adapted to close the conduit when the poppet bears against the poppet seat. A helical spring is used to bias the poppet to bear against the poppet seat such that the conduit would be normally closed. However, a frangible set-off columnar member is compressively disposed between the poppet and the gas control apparatus such that structural disruption of the gas control apparatus will cause the frangible set-off member to break thereby closing the conduit and preventing gas flow from the compression gas cylinder.