Patents by Inventor Paul Silverstein
Paul Silverstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240145213Abstract: An electrode apparatus for an ion implantation system has a base plate having a base plate aperture and at least one securement region. A securement apparatus is associated with each securement region, and a plurality of electrode rods are selectively coupled to the base plate by the securement apparatus. The plurality of electrode rods have a predetermined shape to define an optical region that is associated with the base plate aperture. An electrical coupling electrically connects to the plurality of electrode rods and is configured to electrically connect to an electrical potential. The plurality of electrode rods have a predetermined shape configured to define a path of a charged particle passing between the plurality of electrode rods based on the electrical potential. The plurality of electrode rods can define a suppressor or ground electrode downstream of an extraction aperture of an ion source.Type: ApplicationFiled: October 31, 2022Publication date: May 2, 2024Inventors: Neil Colvin, Paul Silverstein, Joshua Abeshaus
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Patent number: 11545330Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.Type: GrantFiled: May 12, 2021Date of Patent: January 3, 2023Assignee: Axcelis Technologies, Inc.Inventors: Wilhelm Platow, Paul Silverstein, Neil Bassom, Marvin Farley, David Sporleder
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Patent number: 11521821Abstract: An ion source has an arc chamber having one or more arc chamber walls defining and interior region of the arc chamber. A cathode electrode is disposed along an axis. A repeller has a repeller shaft and a ceramic target member separated by a gap. The repeller shaft is not in electrical or mechanical contact with the target member, and the repeller shaft is configured to indirectly heat the target member. The target member, can be a cylinder encircling the repeller shaft, where the gap separates the cylinder from the repeller shaft. A top cap can enclose the cylinder can be separated from a top repeller surface of the repeller shaft by the gap. A target hole can be in the top cap. The target member can be supported by a bottom liner of the arc chamber or a support member mechanically and electrically coupled to the repeller shaft.Type: GrantFiled: April 6, 2021Date of Patent: December 6, 2022Assignee: Axcelis Technologies, Inc.Inventors: Steven T. Drummond, Neil Colvin, Paul Silverstein
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Publication number: 20220367138Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.Type: ApplicationFiled: May 12, 2021Publication date: November 17, 2022Inventors: Wilhelm Platow, Paul Silverstein, Neil Bassom, Marvin Farley, David Sporleder
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Publication number: 20220319796Abstract: An ion source has an arc chamber having one or more arc chamber walls defining and interior region of the arc chamber. A cathode electrode is disposed along an axis. A repeller has a repeller shaft and a ceramic target member separated by a gap. The repeller shaft is not in electrical or mechanical contact with the target member, and the repeller shaft is configured to indirectly heat the target member. The target member, can be a cylinder encircling the repeller shaft, where the gap separates the cylinder from the repeller shaft. A top cap can enclose the cylinder can be separated from a top repeller surface of the repeller shaft by the gap. A target hole can be in the top cap. The target member can be supported by a bottom liner of the arc chamber or a support member mechanically and electrically coupled to the repeller shaft.Type: ApplicationFiled: April 6, 2021Publication date: October 6, 2022Inventors: Steven T. Drummond, Neil Colvin, Paul Silverstein
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Patent number: 11244800Abstract: An ion source for forming a plasma has a cathode with a cavity and a cathode surface defining a cathode step. A filament is disposed within the cavity, and a cathode shield has a cathode shield surface at least partially encircling the cathode surface. A cathode gap is defined between the cathode surface and the cathode shield surface, where the cathode gap defines a tortured path for limiting travel of the plasma through the gap. The cathode surface can have a stepped cylindrical surface defined by a first cathode diameter and a second cathode diameter, where the first cathode diameter and second cathode diameter differ from one another to define the cathode step. The stepped cylindrical surface can be an exterior surface or an interior surface. The first and second cathode diameters can be concentric or axially offset.Type: GrantFiled: May 26, 2021Date of Patent: February 8, 2022Assignee: Axcelis Technologies, Inc.Inventors: Wilhelm Platow, Neil Bassom, Shu Satoh, Paul Silverstein, Marvin Farley
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Publication number: 20210398765Abstract: An ion source for forming a plasma has a cathode with a cavity and a cathode surface defining a cathode step. A filament is disposed within the cavity, and a cathode shield has a cathode shield surface at least partially encircling the cathode surface. A cathode gap is defined between the cathode surface and the cathode shield surface, where the cathode gap defines a tortured path for limiting travel of the plasma through the gap. The cathode surface can have a stepped cylindrical surface defined by a first cathode diameter and a second cathode diameter, where the first cathode diameter and second cathode diameter differ from one another to define the cathode step. The stepped cylindrical surface can be an exterior surface or an interior surface. The first and second cathode diameters can be concentric or axially offset.Type: ApplicationFiled: May 26, 2021Publication date: December 23, 2021Inventors: Wilhelm Platow, Neil Bassom, Shu Satoh, Paul Silverstein, Marvin Farley
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Publication number: 20100214740Abstract: A phase-separated evaporator includes a boiler plate and a phase separation chamber that includes a housing, connected to the boiler plate, having a gas port and a liquid port; and a phase partitioner connected to interiors of the housing, dividing the phase-separated evaporator into a vapor directing compartment and a condensate directing compartment. The phase partitioner includes a partition panel and multiple feeding injectors extending from the partition panel, with the injector tips disposed immediately above the boiler plate. The returning condensate from a condenser enters from the liquid port into the condensate directing compartment and feeds onto the boiler plate through the feeding injectors; while the vapor generated in the vapor directing compartment exits from the gas port, without encountering the condensate.Type: ApplicationFiled: November 5, 2008Publication date: August 26, 2010Applicant: ArticChoke EnterprisesInventors: Paul Silverstein, Frederick K. Husher, Jee Shum
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Patent number: 7686071Abstract: A condenser includes a condenser core, input and output manifolds connected therewith. The condenser core has a blade-thru structure, which is formed by a plurality of layers of thin metal blades stacked on top of another by joint interfaces or joined by spacer rings between two adjacent blades. Each layer of the blades includes condensation chamber(s), wherein the floor of the chamber is monolithic with the rest of the blade. The blades are so aligned that the condensation chamber(s) of each blade are on top of the condensation chamber(s) of the blade immediate underneath, thereby forming phase exchange column(s). Each condensation chamber has one or more apertures on the floor thereof, permitting vapor and condensate to pass therethrough and causing vibration of the chamber floor. Further disclosed is a heat dissipation system utilizing the blade-thru condenser, as well as a computer system utilizing the heat dissipation system.Type: GrantFiled: July 27, 2006Date of Patent: March 30, 2010Assignee: ArticChoke Enterprises LLCInventor: Paul Silverstein
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Patent number: 7450386Abstract: A phase-separated evaporator includes a boiler plate and a phase separation chamber that includes a housing, connected to the boiler plate, having a gas port and a liquid port; and a phase partitioner connected to interiors of the housing, dividing the phase-separated evaporator into a vapor directing compartment and a condensate directing compartment. The phase partitioner includes a partition panel and multiple feeding injectors extending from the partition panel, with the injector tips disposed immediately above the boiler plate. The returning condensate from a condenser enters from the liquid port into the condensate directing compartment and feeds onto the boiler plate through the feeding injectors; while the vapor generated in the vapor directing compartment exits from the gas port, without encountering the condensate.Type: GrantFiled: May 5, 2007Date of Patent: November 11, 2008Inventors: Paul Silverstein, Frederick K. Husher, Jee Shum
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Publication number: 20080030956Abstract: A phase-separated evaporator includes a boiler plate and a phase separation chamber that includes a housing, connected to the boiler plate, having a gas port and a liquid port; and a phase partitioner connected to interiors of the housing, dividing the phase-separated evaporator into a vapor directing compartment and a condensate directing compartment. The phase partitioner includes a partition panel and multiple feeding injectors extending from the partition panel, with the injector tips disposed immediately above the boiler plate. The returning condensate from a condenser enters from the liquid port into the condensate directing compartment and feeds onto the boiler plate through the feeding injectors; while the vapor generated in the vapor directing compartment exits from the gas port, without encountering the condensate.Type: ApplicationFiled: May 5, 2007Publication date: February 7, 2008Applicant: ArticChoke EnterprisesInventors: Paul Silverstein, Frederick Husher, Jee Shum
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Publication number: 20070025078Abstract: A condenser includes a condenser core, input and output manifolds connected therewith. The condenser core has a blade-thru structure, which is formed by a plurality of layers of thin metal blades stacked on top of another by joint interfaces or joined by spacer rings between two adjacent blades. Each layer of the blades includes condensation chamber(s), wherein the floor of the chamber is monolithic with the rest of the blade. The blades are so aligned that the condensation chamber(s) of each blade are on top of the condensation chamber(s) of the blade immediate underneath, thereby forming phase exchange column(s). Each condensation chamber has one or more apertures on the floor thereof, permitting vapor and condensate to pass therethrough and causing vibration of the chamber floor. Further disclosed is a heat dissipation system utilizing the blade-thru condenser, as well as a computer system utilizing the heat dissipation system.Type: ApplicationFiled: July 27, 2006Publication date: February 1, 2007Applicant: ArticChoke Enterprises LLCInventor: Paul Silverstein
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Patent number: 4561435Abstract: There is disclosed a bandage which permits drying of a wound or the wound exudate and yet which provides a barrier to bacteria, said bandage comprising an absorbent pad, a barrier film positioned over the surface of said pad, said barrier film being gas permeable and yet substantially impermeable to bacteria, an adhesive coated film or fabric positioned over and around the periphery of the pad and barrier film, said adhesive coated film or fabric being bonded to the periphery of the barrier film thus creating an open window in the center portion of the adhesive film, the adhesive coated film or fabric extending beyond the perimeter of the barrier film and said pad such that when the bandage is applied to the skin of a patient, the portion of the adhesive coated film or fabric extending beyond the perimeter of the pad and barrier film will contact the skin of the patient and form a means of attachment to the skin, the adhesive coated film or fabric and barrier film together forming a bacteria impermeable barriType: GrantFiled: April 4, 1984Date of Patent: December 31, 1985Assignee: Chesebrough-Ponds, Inc.Inventors: James T. McKnight, Paul Silverstein