Patents by Inventor Paul Silverstein

Paul Silverstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240145213
    Abstract: An electrode apparatus for an ion implantation system has a base plate having a base plate aperture and at least one securement region. A securement apparatus is associated with each securement region, and a plurality of electrode rods are selectively coupled to the base plate by the securement apparatus. The plurality of electrode rods have a predetermined shape to define an optical region that is associated with the base plate aperture. An electrical coupling electrically connects to the plurality of electrode rods and is configured to electrically connect to an electrical potential. The plurality of electrode rods have a predetermined shape configured to define a path of a charged particle passing between the plurality of electrode rods based on the electrical potential. The plurality of electrode rods can define a suppressor or ground electrode downstream of an extraction aperture of an ion source.
    Type: Application
    Filed: October 31, 2022
    Publication date: May 2, 2024
    Inventors: Neil Colvin, Paul Silverstein, Joshua Abeshaus
  • Patent number: 11545330
    Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: January 3, 2023
    Assignee: Axcelis Technologies, Inc.
    Inventors: Wilhelm Platow, Paul Silverstein, Neil Bassom, Marvin Farley, David Sporleder
  • Patent number: 11521821
    Abstract: An ion source has an arc chamber having one or more arc chamber walls defining and interior region of the arc chamber. A cathode electrode is disposed along an axis. A repeller has a repeller shaft and a ceramic target member separated by a gap. The repeller shaft is not in electrical or mechanical contact with the target member, and the repeller shaft is configured to indirectly heat the target member. The target member, can be a cylinder encircling the repeller shaft, where the gap separates the cylinder from the repeller shaft. A top cap can enclose the cylinder can be separated from a top repeller surface of the repeller shaft by the gap. A target hole can be in the top cap. The target member can be supported by a bottom liner of the arc chamber or a support member mechanically and electrically coupled to the repeller shaft.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: December 6, 2022
    Assignee: Axcelis Technologies, Inc.
    Inventors: Steven T. Drummond, Neil Colvin, Paul Silverstein
  • Publication number: 20220367138
    Abstract: An ion source has an arc chamber having first and second ends and an aperture plate to enclose a chamber volume. An extraction aperture is disposed between the first and second ends. A cathode is near the first end of the arc chamber, and a repeller is near the second end. A generally U-shaped first bias electrode is on a first side of the extraction aperture within the chamber volume. A generally U-shaped second bias electrode is on a second side of the extraction aperture within the chamber volume, where the first and second bias electrodes are separated by a first distance proximate to the extraction aperture and a second distance distal from the extraction aperture. An electrode power supply provides a first and second positive voltage to the first and second bias electrodes, where the first and second positive voltages differ by a predetermined bias differential.
    Type: Application
    Filed: May 12, 2021
    Publication date: November 17, 2022
    Inventors: Wilhelm Platow, Paul Silverstein, Neil Bassom, Marvin Farley, David Sporleder
  • Publication number: 20220319796
    Abstract: An ion source has an arc chamber having one or more arc chamber walls defining and interior region of the arc chamber. A cathode electrode is disposed along an axis. A repeller has a repeller shaft and a ceramic target member separated by a gap. The repeller shaft is not in electrical or mechanical contact with the target member, and the repeller shaft is configured to indirectly heat the target member. The target member, can be a cylinder encircling the repeller shaft, where the gap separates the cylinder from the repeller shaft. A top cap can enclose the cylinder can be separated from a top repeller surface of the repeller shaft by the gap. A target hole can be in the top cap. The target member can be supported by a bottom liner of the arc chamber or a support member mechanically and electrically coupled to the repeller shaft.
    Type: Application
    Filed: April 6, 2021
    Publication date: October 6, 2022
    Inventors: Steven T. Drummond, Neil Colvin, Paul Silverstein
  • Patent number: 11244800
    Abstract: An ion source for forming a plasma has a cathode with a cavity and a cathode surface defining a cathode step. A filament is disposed within the cavity, and a cathode shield has a cathode shield surface at least partially encircling the cathode surface. A cathode gap is defined between the cathode surface and the cathode shield surface, where the cathode gap defines a tortured path for limiting travel of the plasma through the gap. The cathode surface can have a stepped cylindrical surface defined by a first cathode diameter and a second cathode diameter, where the first cathode diameter and second cathode diameter differ from one another to define the cathode step. The stepped cylindrical surface can be an exterior surface or an interior surface. The first and second cathode diameters can be concentric or axially offset.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: February 8, 2022
    Assignee: Axcelis Technologies, Inc.
    Inventors: Wilhelm Platow, Neil Bassom, Shu Satoh, Paul Silverstein, Marvin Farley
  • Publication number: 20210398765
    Abstract: An ion source for forming a plasma has a cathode with a cavity and a cathode surface defining a cathode step. A filament is disposed within the cavity, and a cathode shield has a cathode shield surface at least partially encircling the cathode surface. A cathode gap is defined between the cathode surface and the cathode shield surface, where the cathode gap defines a tortured path for limiting travel of the plasma through the gap. The cathode surface can have a stepped cylindrical surface defined by a first cathode diameter and a second cathode diameter, where the first cathode diameter and second cathode diameter differ from one another to define the cathode step. The stepped cylindrical surface can be an exterior surface or an interior surface. The first and second cathode diameters can be concentric or axially offset.
    Type: Application
    Filed: May 26, 2021
    Publication date: December 23, 2021
    Inventors: Wilhelm Platow, Neil Bassom, Shu Satoh, Paul Silverstein, Marvin Farley
  • Publication number: 20100214740
    Abstract: A phase-separated evaporator includes a boiler plate and a phase separation chamber that includes a housing, connected to the boiler plate, having a gas port and a liquid port; and a phase partitioner connected to interiors of the housing, dividing the phase-separated evaporator into a vapor directing compartment and a condensate directing compartment. The phase partitioner includes a partition panel and multiple feeding injectors extending from the partition panel, with the injector tips disposed immediately above the boiler plate. The returning condensate from a condenser enters from the liquid port into the condensate directing compartment and feeds onto the boiler plate through the feeding injectors; while the vapor generated in the vapor directing compartment exits from the gas port, without encountering the condensate.
    Type: Application
    Filed: November 5, 2008
    Publication date: August 26, 2010
    Applicant: ArticChoke Enterprises
    Inventors: Paul Silverstein, Frederick K. Husher, Jee Shum
  • Patent number: 7686071
    Abstract: A condenser includes a condenser core, input and output manifolds connected therewith. The condenser core has a blade-thru structure, which is formed by a plurality of layers of thin metal blades stacked on top of another by joint interfaces or joined by spacer rings between two adjacent blades. Each layer of the blades includes condensation chamber(s), wherein the floor of the chamber is monolithic with the rest of the blade. The blades are so aligned that the condensation chamber(s) of each blade are on top of the condensation chamber(s) of the blade immediate underneath, thereby forming phase exchange column(s). Each condensation chamber has one or more apertures on the floor thereof, permitting vapor and condensate to pass therethrough and causing vibration of the chamber floor. Further disclosed is a heat dissipation system utilizing the blade-thru condenser, as well as a computer system utilizing the heat dissipation system.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: March 30, 2010
    Assignee: ArticChoke Enterprises LLC
    Inventor: Paul Silverstein
  • Patent number: 7450386
    Abstract: A phase-separated evaporator includes a boiler plate and a phase separation chamber that includes a housing, connected to the boiler plate, having a gas port and a liquid port; and a phase partitioner connected to interiors of the housing, dividing the phase-separated evaporator into a vapor directing compartment and a condensate directing compartment. The phase partitioner includes a partition panel and multiple feeding injectors extending from the partition panel, with the injector tips disposed immediately above the boiler plate. The returning condensate from a condenser enters from the liquid port into the condensate directing compartment and feeds onto the boiler plate through the feeding injectors; while the vapor generated in the vapor directing compartment exits from the gas port, without encountering the condensate.
    Type: Grant
    Filed: May 5, 2007
    Date of Patent: November 11, 2008
    Inventors: Paul Silverstein, Frederick K. Husher, Jee Shum
  • Publication number: 20080030956
    Abstract: A phase-separated evaporator includes a boiler plate and a phase separation chamber that includes a housing, connected to the boiler plate, having a gas port and a liquid port; and a phase partitioner connected to interiors of the housing, dividing the phase-separated evaporator into a vapor directing compartment and a condensate directing compartment. The phase partitioner includes a partition panel and multiple feeding injectors extending from the partition panel, with the injector tips disposed immediately above the boiler plate. The returning condensate from a condenser enters from the liquid port into the condensate directing compartment and feeds onto the boiler plate through the feeding injectors; while the vapor generated in the vapor directing compartment exits from the gas port, without encountering the condensate.
    Type: Application
    Filed: May 5, 2007
    Publication date: February 7, 2008
    Applicant: ArticChoke Enterprises
    Inventors: Paul Silverstein, Frederick Husher, Jee Shum
  • Publication number: 20070025078
    Abstract: A condenser includes a condenser core, input and output manifolds connected therewith. The condenser core has a blade-thru structure, which is formed by a plurality of layers of thin metal blades stacked on top of another by joint interfaces or joined by spacer rings between two adjacent blades. Each layer of the blades includes condensation chamber(s), wherein the floor of the chamber is monolithic with the rest of the blade. The blades are so aligned that the condensation chamber(s) of each blade are on top of the condensation chamber(s) of the blade immediate underneath, thereby forming phase exchange column(s). Each condensation chamber has one or more apertures on the floor thereof, permitting vapor and condensate to pass therethrough and causing vibration of the chamber floor. Further disclosed is a heat dissipation system utilizing the blade-thru condenser, as well as a computer system utilizing the heat dissipation system.
    Type: Application
    Filed: July 27, 2006
    Publication date: February 1, 2007
    Applicant: ArticChoke Enterprises LLC
    Inventor: Paul Silverstein
  • Patent number: 4561435
    Abstract: There is disclosed a bandage which permits drying of a wound or the wound exudate and yet which provides a barrier to bacteria, said bandage comprising an absorbent pad, a barrier film positioned over the surface of said pad, said barrier film being gas permeable and yet substantially impermeable to bacteria, an adhesive coated film or fabric positioned over and around the periphery of the pad and barrier film, said adhesive coated film or fabric being bonded to the periphery of the barrier film thus creating an open window in the center portion of the adhesive film, the adhesive coated film or fabric extending beyond the perimeter of the barrier film and said pad such that when the bandage is applied to the skin of a patient, the portion of the adhesive coated film or fabric extending beyond the perimeter of the pad and barrier film will contact the skin of the patient and form a means of attachment to the skin, the adhesive coated film or fabric and barrier film together forming a bacteria impermeable barri
    Type: Grant
    Filed: April 4, 1984
    Date of Patent: December 31, 1985
    Assignee: Chesebrough-Ponds, Inc.
    Inventors: James T. McKnight, Paul Silverstein