Abstract: The present invention features methods of treating lung cancer (e.g., NSCLC) with an anti-PD-L1 antibody and tremelimumab in a subject identified as having a PD-L1 negative tumor.

Abstract: Methods and apparatus for reducing post PECVD vacuum and abatement system fouling. Chamber cleaning times are reduced leading to increased efficiency and lower cost fabrication processes by introducing F2 or a fluorine containing gas into the PECVD system. When using F2, the cleaning gas may be introduced directly to desired locations of the system where it can interact without activation with unwanted deposits. Alternatively, the cleaning gas may be activated in-situ in the equipment using existing plasma discharge equipment, or the cleaning gas may be activated using an RPS and then introduced to the desired location in its already activated state.

Abstract: In immersion photolithography, immersion fluid is located between a wafer and a lens for projecting an image onto the wafer through the immersion fluid. In order to inhibit evaporation from the immersion fluid, a purge fluid saturated with a component of the immersion fluid is conveyed about the immersion fluid.

Abstract: A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phases. The pumping arrangement comprises a first pump for extracting gas from the tank, and a second pump for extracting liquid from the tank. In order to minimize any pressure fluctuations transmitted from the vacuum system back to the fluid within the tool, a pressure control system maintains a substantially constant pressure in the tank by regulating the amounts of liquid and gas within the tank.