Patents by Inventor Paul V. Chayka

Paul V. Chayka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5952046
    Abstract: A method of forming a carbide material on a substrate, comprising vaporizing a carbide source reagent to form a carbide source reagent vapor, and contacting the carbide source reagent vapor with the substrate to deposit the carbide material on the substrate, wherein the carbide source reagent comprises a compound of the formula: ##STR1## wherein: R.sub.1, R.sub.2, R.sub.3 and R.sub.4 may each vary independently of the others and are selected from the group consisting of hydrogen and C.sub.1 -C.sub.8 alkyl;M is selected from the group consisting of Si, Nb, Ge, Sn, Pb, V, W, Cr, Mo, Ta, Ti, Zr, Hf, Mn, Pt, Pd, Ir, Rh and Ru;A and B may vary independently of one another and are selected from the group consisting of C.sub.1 -C.sub.4 alkyl; andn is at least 2.The method of the invention may be used to form SiC or other carbide coatings on substrates to enhance tribological characteristics thereof, or to form thin film layers of SiC or other carbides for electronic device fabrication.
    Type: Grant
    Filed: January 21, 1998
    Date of Patent: September 14, 1999
    Assignee: Advanced Technology Materials, Inc.
    Inventor: Paul V. Chayka
  • Patent number: 5698022
    Abstract: A precursor composition useful for vapor deposition formation of lanthanide metal/phosphorus oxide films, comprising a precursor compound selected from the group consisting of: (i) adducts of the formula MA.sub.3 (L).sub.x ; (ii) phosphido complexes of the formulae M(PR.sub.3).sub.3 or M(PR.sub.3).sub.3 L.sub.x ; and (iii) disubstituted phosphate complexes of the formulae A.sub.2 M(O.sub.2 P(OR).sub.2), AM(O.sub.2 P(OR).sub.2).sub.2, and M(O.sub.2 P(OR).sub.2).sub.3, wherein: x is from 1 to 5, A=Cp or .beta.-diketonate, Cp=cyclopentadienyl, methylcyclopentadienyl, or TMS-cyclopentadienyl, R=C.sub.1 -C.sub.8 alkyl, and L=a phosphorus-containing ligand selected from the group consisting of phosphine, phosphine oxide, phosphite, phosphate, and 1,2-bis(dimethoxyphosphoryl)benzene, subject to the provisos that: when x is 2 or greater, each L may be the same as or different from the other L; and when the precursor compound is a .beta.-diketonate compound of formula (i), L is not phosphate or phosphine oxide.
    Type: Grant
    Filed: August 14, 1996
    Date of Patent: December 16, 1997
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Timothy E. Glassman, Paul V. Chayka
  • Patent number: 5200370
    Abstract: Monocrystalline ceramic fibers are disclosed together with a process for preparing such fibers. Polycrystalline ceramic fibers in a tow are coated with a coating that is chemically substantially non-reactive with the ceramic (e.g. alumina fibers coated with molybdenum), and the coated fibers are drawn through a heating zone maintained at a temperature high enough to melt the fibers without melting the coating. The coated fibers are withdrawn from the heating zone and cooled rapidly enough to form a substantially monocrystalline ceramic. The protective coating may thereafter be removed to leave a tow of substantially single-crystal ceramic fibers. Monocrystalline ceramic fibers about 8-20 microns in diameter are prepared by the disclosed process.
    Type: Grant
    Filed: November 16, 1990
    Date of Patent: April 6, 1993
    Assignee: Fiber Materials, Inc.
    Inventors: James R. Lennox, Roger T. Pepper, Paul V. Chayka