Abstract: A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.

Abstract: An increased flux density D'Arsonval Micro-Electro-Mechanical Systems (MEMS) device increases flux density. The increased flux density D'Arsonval Micro-Electro-Mechanical Systems (MEMS) device includes a housing, a proof mass suspended within the housing by at least one torsional flexure, a second torsional rebalancing magnet, and a current coil disposed on the proof mass. A portion of the current coil is disposed between the first torsional rebalancing magnet and the second torsional rebalancing magnet. A field generated in response to a current in the current coil interacts with a magnetic field generated by the first torsional rebalancing magnet and the second torsional rebalancing magnet. The magnetic field generates a rebalancing force that stabilizes a position of the proof mass.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. An example MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass, at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass, at least one pole piece located outside the coil, and at least one magnetic flux concentrator located inside the coil opposite the at least one of the at least one pole pieces. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil between the magnetic flux concentrator and the pole piece.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the poof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass about the at least one torsional flexure and at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Methods and systems for creating microelectromechanical system (MEMS) gyros. The methods and systems include generating a map of motor bias and creating MEMS gyros based on the map of motor bias to achieve a higher yield of usable MEMS gyros per wafer. The systems include a processor with components configured to determine paths of optimal motor bias for a given deep reactive ion etcher on a wafer, a stepper for imprinting a pattern for each gyro in an orientation that corresponds to the path of optimal motor bias each gyro is calculated to be most near on the wafer, and a deep reactive ion etcher to etch the gyros in the wafer.

Abstract: Methods and systems for forming accelerometers include forming a load beam supported at one end having an input interdigital transducer (IDT) and an output IDT. The load-beam has a cross section varying in the longitudinal direction effective to cause the load beam to deflect radially in response to an applied load. The cross section varies in width, height, or both.

Abstract: Accelerometers having higher concentration of flux closer to the proof mass. The invention includes a proof mass, an excitation ring, a magnet, a pole piece, and a coil. The excitation ring includes a ring unit and a base unit that are attached and the ring unit or base unit includes an annular groove. The magnet is mounted to the base unit and the pole piece is mounted to the magnet. The coil is attached directly to the proof mass. A gap is formed between the ring unit and the pole piece. The pole piece includes a first section that has a radius smaller than the radius of a second section.

Abstract: Systems and methods for accurately comparing the thermal expansion coefficient of components (materials substrate, etc.) to be attached in some manner. This invention utilizes the frequency output of a double-ended quartz resonator bonded to first and second reference components to generate waveforms when the components are subjected to a temperature change. The waveforms are compared to determine the thermal expansion compatibility of the components.

Abstract: Micro-machined electromechanical sensor (MEMS) devices having feature orientation delicately adjusted after initial formation and installation within the device packaging to trim one or more performance parameters of interest, including modulation, bias and other dynamic behaviors of the MEMS devices.

Abstract: A method for delicately adjusting an orientation of features in completed micro-machined electromechanical sensor (MEMS) devices after initial formation and installation within the device packaging to trim one or more performance parameters of interest, including modulation, bias and other dynamic behaviors of the MEMS devices.

Abstract: A method for delicately adjusting an orientation of features in completed micro-machined electromechanical sensor (MEMS) devices after initial formation and installation within the device packaging to trim one or more performance parameters of interest, including modulation, bias and other dynamic behaviors of the MEMS devices.

Abstract: A method for delicately adjusting an orientation of features in completed micro-machined electromechanical sensor (MEMS) devices after initial formation and installation within the device packaging to trim one or more performance parameters of interest, including modulation, bias and other dynamic behaviors of the MEMS devices.