Abstract: A Time of Flight Mass Spectrometer which features rastering the secondary beam on the surface and analyzing composition at each of the rastered locations thereby greatly increasing the rate of data throughput. The primary beam is rastered on the target surface and the secondary beam is rastered on the detector surface. The latter arrangement provides ways of interpreting data including mapping the distribution of selected species on the target surface. The secondary beam is generated from a gas. This latter arrangement is especially useful for studying reaction rams of mixtures of reactive gases.

Abstract: An instrument for surface analysis includes rastering an electron beam across an anode to generate x-rays. A concave Bragg monochromator focuses an energy peak of the x-rays to a specimen surface, the x-rays rastering the surface to emit photoelectrons. An analyzer provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface for imaging of the specimen. Alternatively a lens formed of two concave grids transits the photoelectrons to the analyzer with selectively modified energy so that the analyzer detects either higher energy electrons characteristic of chemical species or lower electrons for the image. The monochromator is formed of platelets cut from an array of platelets in a single crystal member.

Abstract: An instrument for surface analysis includes a gun for selectively focusing an electron beam on an anode spot, or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator focuses an energy peak of the x-rays to a specimen surface, in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer with a detector provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.

Abstract: A system for producing an Auger image which is substantially independent of the topographical contour of the sample surface includes at least two counting means. Preferably, the two counting means are adapted to be dedicated counters, one for background incidents and one for signal incidents. The system also includes counter control means for regulating the counting time and the immersion incident energy threshold for each counter.

Abstract: An electron multiplier, including an excitation means and collector, disposed in a high vacuum chamber and adapted to be coupled at its input to a charged particle analyzer is coupled through the vacuum chamber wall by a plurality of electrical feedthrough devices such that the excitation means is coupled to a high voltage power supply disposed outside the high vacuum chamber and the collector is coupled simultaneously through a capacitance coupling means and a resistance coupling means, both disposed within the high vacuum chamber, to an amplifier-discriminator and floating operational amplifier, respectively, both disposed outside the high vacuum chamber. The impedance offered by the capacitance coupling means is substantially lower than that offered by the resistance coupling to 10 nanosecond current pulses originating from single electron events.

Abstract: A scanning Auger microprobe in a cylindrical mirror analyzer is provided wherein an aperture plate at the exit stage is controllably variable in aperture size and is positioned near the second order focus point and at the minimum trace of the analyzer. Control of the aperture size is provided in both an infinitely variable arrangement and in a three size exit aperture arrangement.