Patents by Inventor Paul Wiliam Pastel

Paul Wiliam Pastel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for conditioning process chambers
    Patent number: 6420274
    Abstract: A method for conditioning the inside walls of a process chamber is described incorporating a selected process gas such as Br, Br2, HBr, Cl2, HCl, F2, SiFx, and NF3, a pressure controller, and a timer for soaking the chamber. The invention overcomes the problem of running dummy product wafers to condition the chamber.
    Type: Grant
    Filed: May 10, 2000
    Date of Patent: July 16, 2002
    Assignee: International Business Machines Corporation
    Inventors: John M. Baker, Marc Waine Cantell, Paul Wiliam Pastel, Alejandro Gabriel Schrott, Ying Zhang