Patents by Inventor Paula E. Peavey

Paula E. Peavey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chrome mask etch
    Patent number: 4774164
    Abstract: Patterning a chrome mask with PBS (polybutenesulfone) photoresist is enabled in a plasma reactor by covering the patterned photoresist with a glass layer, planarizing the glass layer, etching the photoresist and then etching the chrome mask. The pattern transferred to the chrome mask is the negative or inverse of the pattern in the photoresist layer.
    Type: Grant
    Filed: April 6, 1987
    Date of Patent: September 27, 1988
    Assignee: Tegal Corporation
    Inventors: Paula E. Peavey, Jerris H. Peavey