Abstract: A system and method are provided for profiling a structure in an integrated circuit to determine the structural dimensions. The system comprises a processor circuit that includes a processor electrically coupled to a local interface and a memory electrically coupled to the local interface, where the local interface comprises, for example, a data bus and associated control bus. The system further comprises a critical dimension scanning electron microscope having a signal output electrically coupled to the local interface and operating logic stored on the memory and executable by the processor. The operating logic comprises logic to execute a scan of a structure in an integrated circuit using the SEM, logic to store a first derivative waveform generated from the scan in the memory, and logic to generate a profile of the structure from the first derivative waveform.