Patents by Inventor Paulina Alejandra Rincon Delgadillo

Paulina Alejandra Rincon Delgadillo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10048212
    Abstract: A method for evaluating the quality of a directed self-assembling method used for generating directed self-assembling patterns. The method for evaluating comprises obtaining at least one set of parameter values for a parameterized set of processing steps and material properties characterizing the directed self-assembling method, thus characterizing a specific directed self-assembling method used for generating a directed self-assembled pattern. The method furthermore comprises obtaining a scattered radiation pattern on the directed self-assembled pattern obtained using the directed self-assembling method characterized by the set of parameter values, thus obtaining scattered radiation pattern results for the directed self-assembled pattern. The method furthermore comprises determining based on the scattered radiation pattern results a qualification score and correlating the qualification score with the set of parameter values.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: August 14, 2018
    Assignee: IMEC VZW
    Inventors: Roel Gronheid, Lieve Van Look, Paulina Alejandra Rincon Delgadillo
  • Publication number: 20150276624
    Abstract: A method for evaluating the quality of a directed self-assembling method used for generating directed self-assembling patterns. The method for evaluating comprises obtaining at least one set of parameter values for a parameterized set of processing steps and material properties characterizing the directed self-assembling method, thus characterizing a specific directed self-assembling method used for generating a directed self-assembled pattern. The method furthermore comprises obtaining a scattered radiation pattern on the directed self-assembled pattern obtained using the directed self-assembling method characterized by the set of parameter values, thus obtaining scattered radiation pattern results for the directed self-assembled pattern. The method furthermore comprises determining based on the scattered radiation pattern results a qualification score and correlating the qualification score with the set of parameter values.
    Type: Application
    Filed: March 31, 2015
    Publication date: October 1, 2015
    Applicants: Katholieke Universiteit Leuven, KU LEUVEN R&D, IMEC VZW
    Inventors: Roel Gronheid, Lieve Van Look, Paulina Alejandra Rincon Delgadillo