Patents by Inventor Pauline Begoc

Pauline Begoc has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system, inspection tool with illumination system, and method of operating an illumination system
    Patent number: 10379057
    Abstract: An illumination system, an inspection tool and a method for inspecting an object are disclosed. A configurable area light source is arranged in an illumination optical axis of an illumination beam path, wherein the configurable area light source is configured such that different beam diameters are settable. At least one illumination lens is positioned in the illumination beam path for directing a collimated beam at least onto a field of view on a surface of the object, wherein a value of an angle of incidence of the illumination optical axis of the illumination beam path equals a value of an angle of reflectance of the imaging optical axis of the imaging beam path. The invention allows the combination of the functionality of a wide angle coaxial illumination and a collimated coaxial illumination in one illumination system.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: August 13, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Filip Cauwenberghs, Johan DeGreeve, Pauline Begoc, Koen Goorman
  • ILLUMINATION SYSTEM, INSPECTION TOOL WITH ILLUMINATION SYSTEM, AND METHOD OF OPERATING AN ILLUMINATION SYSTEM
    Publication number: 20160123892
    Abstract: An illumination system, an inspection tool and a method for inspecting an object are disclosed. A configurable area light source is arranged in an illumination optical axis of an illumination beam path, wherein the configurable area light source is configured such that different beam diameters are settable. At least one illumination lens is positioned in the illumination beam path for directing a collimated beam at least onto a field of view on a surface of the object, wherein a value of an angle of incidence of the illumination optical axis of the illumination beam path equals a value of an angle of reflectance of the imaging optical axis of the imaging beam path. The invention allows the combination of the functionality of a wide angle coaxial illumination and a collimated coaxial illumination in one illumination system.
    Type: Application
    Filed: December 30, 2015
    Publication date: May 5, 2016
    Inventors: Filip Cauwenberghs, Johan DeGreeve, Pauline Begoc, Koen Goorman