Abstract: A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

Abstract: A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.

Abstract: In an embodiment, a lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate, wherein the lithographic apparatus includes an air shower and a temperature sensor positioned near the air shower for measuring the temperature of an air stream in the air shower. The temperature sensor is a thermocouple sensor, e.g., of a thermopile arrangement type. The thermocouple sensor includes a plurality of thermocouples in series, wherein a cold junction and a hot junction are provided, the cold junction being connected to a heat sink, and the hot junction being positioned into the air stream of the air shower.

Abstract: In an embodiment, a lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate, wherein the lithographic apparatus includes an air shower and a temperature sensor positioned near the air shower for measuring the temperature of an air stream in the air shower. The temperature sensor is a thermocouple sensor, e.g., of a thermopile arrangement type. The thermocouple sensor includes a plurality of thermocouples in series, wherein a cold junction and a hot junction are provided, the cold junction being connected to a heat sink, and the hot junction being positioned into the air stream of the air shower.

Abstract: The invention relates to a projection display device having an illumination system comprising a light source and an optical system for providing an illumination beam. The projection display device is further provided with an image display system for modulating the illumination beam with image information and projecting an image on a screen. In order to filter ultra-violet and infra-red radiation from the light source, a filter means is present which transmit visible light. Cooling means comprising a cooling liquid are present for cooling the filter means. In the projection display device the filter means comprises the cooling liquid which contains a radiation-absorbent additive for absorbing the ultra-violet and infra-red radiation.

Abstract: The invention relates to a projection display device having an illumination system comprising a light source and an optical system for providing an illumination beam. The projection display device is further provided with an image display system for modulating the illumination beam with image information and projecting an image on a screen. In order to filter ultra-violet and infra-red radiation from the light source, a filter means is present which transmit visible light. Cooling means comprising a cooling liquid are present for cooling the filter means. In the projection display device, the filter means comprises the cooling liquid which contains a radiation-absorbent additive for absorbing the ultra-violet and infra-red radiation.

Abstract: The invention relates to a projection display device having an illumination system comprising a light source and an optical system for providing an illumination beam. The projection display device is further provided with an image display system for modulating the illumination beam with image information and projecting an image on a screen. In order to filter ultra-violet and infra-red radiation from the light source, a filter means is present which transmit visible light. Cooling means comprising a cooling liquid are present for cooling the filter means. In the projection display device the filter means comprises the cooling liquid which contains a radiation-absorbent additive for absorbing the ultra-violet and infra-red radiation.

Abstract: The invention relates to a lighting system (1) comprising a lamp-reflector unit (2) in a housing (5), the housing (5) having air flow cooling means (7) and a ventilation opening (8). The lamp-reflector unit (2) is provided with a shield (9), for example a black coating, for avoiding light originating from the lamp-reflector unit (2) to emit from the housing (5) through its ventilation opening (8) during operation of the lamp (16). Thus a simple and relatively quiet cooling of the lighting system (1) is obtained.