Patents by Inventor Paulus Martinus Hubertus Vissers

Paulus Martinus Hubertus Vissers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • STAGE APPARATUS
    Publication number: 20230360879
    Abstract: The present disclosure relates to a stage apparatus comprising: an object table configured to hold a substrate, the object table comprising an electrode configured to be charged by a power source and an electrical connection configured to electrically connect the electrode to the power source, and an electric field shield configured to shield at least a part of the electrical connection.
    Type: Application
    Filed: May 11, 2023
    Publication date: November 9, 2023
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Paulus Martinus Hubertus VISSERS
  • Stage apparatus
    Patent number: 11694870
    Abstract: The present disclosure relates to a stage apparatus comprising: an object table configured to hold a substrate, the object table comprising an electrode configured to be charged by a power source and an electrical connection configured to electrically connect the electrode to the power source, and an electric field shield configured to shield at least a part of the electrical connection.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: July 4, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Jan-Gerard Cornelis Van Der Toorn, Paulus Martinus Hubertus Vissers
  • STAGE APPARATUS
    Publication number: 20210375580
    Abstract: The present disclosure relates to a stage apparatus comprising: an object table configured to hold a substrate, the object table comprising an electrode configured to be charged by a power source and an electrical connection configured to electrically connect the electrode to the power source, and an electric field shield configured to shield at least a part of the electrical connection.
    Type: Application
    Filed: June 17, 2021
    Publication date: December 2, 2021
    Inventors: Jan-Gerard Cornelis VAN DER TOORN, Paulus Martinus Hubertus VISSERS
  • Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table
    Patent number: 8634052
    Abstract: A lithographic apparatus that includes a substrate table holding a substrate, a projection system configured to project a patterned beam of radiation onto the substrate, a liquid supply system configured to provide a liquid to a space between the projection system and the substrate table, and a ring located such that it covers a gap between the substrate and the substrate table, the ring being in contact with the substrate and with the substrate table.
    Type: Grant
    Filed: November 27, 2007
    Date of Patent: January 21, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Suzan Leonie Auer-Jongepier, Jeroen Johannes Sophia Maria Mertens, Frank Bernhard Sperling, Teunis Cornelis Van Den Dool, Eva Mondt, Alexander Nikolov Zdravkov, Paulus Martinus Hubertus Vissers
  • Lithographic apparatus and method
    Publication number: 20080186460
    Abstract: A lithographic apparatus is disclosed that includes a substrate table holding a substrate, a projection system configured to project a patterned beam of radiation onto the substrate, a liquid supply system configured to provide a liquid to a space between the projection system and the substrate table, and a ring located such that it covers a gap between the substrate and the substrate table, the ring being in contact with the substrate and with the substrate table.
    Type: Application
    Filed: November 27, 2007
    Publication date: August 7, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Suzan Leonie Auer-Jongepier, Jeroen Johannes Sophia Maria Mertens, Frank Bernhard Sperling, Teunis Cornelis Van Den Dool, Eva Mondt, Alexander Nikolov Zdravkov, Paulus Martinus Hubertus Vissers