Abstract: A method for coalescing a disperse phase component in a primarily gas process fluid includes passing the process fluid through a structure. The structure includes an outer wall with an electrically insulating material formed on an entire inner surface of the outer wall to define an entirely insulated flow path for receiving the process fluid and the flow path is free of any portion of the structure. A plurality of planar, spaced-apart electrode plates is positioned within the entirely insulated flow path and positioned substantially parallel to one another and substantially the entirety of each of the plurality of electrode plates is coated with an insulative material. At least one insulating member disposed in a space between and spaced apart from two adjacent electrode plates. A power source is applied to the electrode plates to generate an electrical field to coalesce droplets of the disperse phase component.

Abstract: An electrostatic coalescer includes an outer wall defining a flow path for receiving a process fluid. A plurality of electrode plates is disposed within the flow path. A controller includes an inductor and a signal generator. The inductor is coupled in parallel with the plurality of electrode plates. The inductor and the plurality of electrode plates define a resonant circuit. The signal generator is coupled to the plurality of electrode plates and operable to apply an alternating current signal to the plurality of electrode plates at a frequency corresponding to a resonant frequency of the resonant circuit in the presence of the process fluid. The signal generator varies the frequency of the alternating current signal based on a positive feedback signal received from the resonant circuit to maintain resonance.

Abstract: A method for coalescing a disperse phase component in a primarily gas process fluid includes passing the process fluid through a structure. The structure includes an outer wall with an electrically insulating material formed on an entire inner surface of the outer wall to define an entirely insulated flow path for receiving the process fluid and the flow path is free of any portion of the structure. A plurality of planar, spaced-apart electrode plates is positioned within the entirely insulated flow path and positioned substantially parallel to one another and substantially the entirety of each of the plurality of electrode plates is coated with an insulative material. At least one insulating member disposed in a space between and spaced apart from two adjacent electrode plates. A power source is applied to the electrode plates to generate an electrical field to coalesce droplets of the disperse phase component.

Abstract: An electrostatic coalescer that includes an outer wall defining a flow path for receiving a process fluid comprising primarily a gas, a power source, a plurality of electrode plates coupled to the power source to generate an electrical field across the flow path wherein each of the plurality of electrode plates is coated with an insulation material and at least one insulating member is disposed between two adjacent electrode plates.

Abstract: An electrostatic coalescer includes an outer wall defining a flow path for receiving a process fluid comprising primarily a gas, a power source, and a plurality of electrode plates coupled to the power source to generate an electrical field across the flow path.

Abstract: An electrostatic coalescer includes an outer wall defining a flow path for receiving a process fluid. A plurality of electrode plates is disposed within the flow path. A controller includes an inductor and a signal generator. The inductor is coupled in parallel with the plurality of electrode plates. The inductor and the plurality of electrode plates define a resonant circuit. The signal generator is coupled to the plurality of electrode plates and operable to apply an alternating current signal to the plurality of electrode plates at a frequency corresponding to a resonant frequency of the resonant circuit in the presence of the process fluid. The signal generator varies the frequency of the alternating current signal based on a positive feedback signal received from the resonant circuit to maintain resonance.

Abstract: A radiation source unit is provided that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a space between said anode and cathode and to form a plasma so as to generate electromagnetic radiation. The substance may comprise xenon, indium, lithium, tin or any suitable material. To improve conversion efficiency, the source unit may be constructed to have a low inductance, and operated with a minimum of plasma. To, for example, improve heat dissipation, a fluid circulation system can be created within the source volume and a wick by using a fluid in both its vapor and liquid states. To, for example, prevent contamination from entering a lithographic projection apparatus, the source unit can be constructed to minimize the production of contamination, and a trap can be employed to capture the contamination without interfering with the emitted radiation.