Patents by Inventor Pavel Evtushenko

Pavel Evtushenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11626704
    Abstract: A radiation source arrangement causes interaction between pump radiation (340) and a gaseous medium (406) to generate EUV or soft x-ray radiation by higher harmonic generation (HHG). The operating condition of the radiation source arrangement is monitored by detecting (420/430) third radiation (422) resulting from an interaction between condition sensing radiation and the medium. The condition sensing radiation (740) may be the same as the first radiation or it may be separately applied. The third radiation may be for example a portion of the condition sensing radiation that is reflected or scattered by a vacuum-gas boundary, or it may be lower harmonics of the HHG process, or fluorescence, or scattered. The sensor may include one or more image detectors so that spatial distribution of intensity and/or the angular distribution of the third radiation may be analyzed. Feedback control based on the determined operating condition stabilizes operation of the HHG source.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: April 11, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Sietse Thijmen Van Der Post, Sander Bas Roobol, Pavel Evtushenko
  • Patent number: 10483712
    Abstract: A method for varying the wavelength of a free electron laser (FEL) by applying an energy dither to the charged particles supplying the FEL. Bunches of charged particle beams are accelerated by cavities that are operated at a harmonic of the bunch repetition rate. The method involves adding one or more secondary radiofrequency accelerator cavities after the primary beam transport and near the wiggler to apply a fluctuation between individual bunches with a pseudo-random distribution. The secondary radiofrequency accelerator cavities provide fine variations of the beam energy about a nominal operating point. Operating a free electron laser (FEL) with a 1% change in the electron beam energy via the added secondary cavities will result in a 2% wavelength variation of the FEL output.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: November 19, 2019
    Assignee: JEFFERSON SCIENCE ASSOCIATES, LLC
    Inventors: Thomas Joseph Powers, David R. Douglas, Pavel Evtushenko, Stephen V. Benson, George Neil
  • Patent number: 10367326
    Abstract: A method for applying an energy dither to a charged particle beam in order to vary the wavelength of the charged particle beam. Bunches of charged particle beams are accelerated by cavities that are operated at a harmonic of the bunch repetition rate. One or more secondary radiofrequency accelerator cavities are added near the wiggler after the primary beam transport to apply a fluctuation between individual bunches with a pseudo-random distribution. The secondary radiofrequency accelerator cavities provide fine variations of the beam energy about a nominal operating point. Operating a free electron laser (FEL) with a 1% change in the electron beam energy via the secondary cavity will result in a 2% wavelength variation of the FEL output.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: July 30, 2019
    Assignee: JEFFERSON SCIENCE ASSOCIATES, LLC
    Inventors: Thomas Joseph Powers, David R. Douglas, Pavel Evtushenko, Stephen V. Benson, George Neil
  • Publication number: 20190207359
    Abstract: A method for varying the wavelength of a free electron laser (FEL) by applying an energy dither to the charged particles supplying the FEL. Bunches of charged particle beams are accelerated by cavities that are operated at a harmonic of the bunch repetition rate. The method involves adding one or more secondary radiofrequency accelerator cavities after the primary beam transport and near the wiggler to apply a fluctuation between individual bunches with a pseudo-random distribution. The secondary radiofrequency accelerator cavities provide fine variations of the beam energy about a nominal operating point. Operating a free electron laser (FEL) with a 1% change in the electron beam energy via the added secondary cavities will result in a 2% wavelength variation of the FEL output.
    Type: Application
    Filed: March 5, 2019
    Publication date: July 4, 2019
    Inventors: Thomas Joseph Powers, David R. Douglas, Pavel Evtushenko, Stephen V. Benson, George Neil
  • Publication number: 20180254597
    Abstract: A radiation source arrangement causes interaction between pump radiation (340) and a gaseous medium (406) to generate EUV or soft x-ray radiation by higher harmonic generation (HHG). The operating condition of the radiation source arrangement is monitored by detecting (420/430) third radiation (422) resulting from an interaction between condition sensing radiation and the medium. The condition sensing radiation (740) may be the same as the first radiation or it may be separately applied. The third radiation may be for example a portion of the condition sensing radiation that is reflected or scattered by a vacuum-gas boundary, or it may be lower harmonics of the HHG process, or fluorescence, or scattered. The sensor may include one or more image detectors so that spatial distribution of intensity and/or the angular distribution of the third radiation may be analyzed. Feedback control based on the determined operating condition stabilizes operation of the HHG source.
    Type: Application
    Filed: February 22, 2018
    Publication date: September 6, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Sietse Thijmen VAN DER POST, Sander Bas ROOBOL, Pavel EVTUSHENKO
  • Patent number: 9674026
    Abstract: A method of determining the beam position in an energy recovered linac (ERL). The method makes use of in phase and quadrature (I/Q) demodulation techniques to separate the pickup signal generated by the electromagnetic fields generated by the first and second pass beam in the energy recovered linac. The method includes using analog or digital based I/Q demodulation techniques in order to measure the relative amplitude of the signals from a position sensitive beam pickup such as a button, strip line or microstripline beam position monitor.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: June 6, 2017
    Assignee: JEFFERSON SCIENCE ASSOCIATES, LLC
    Inventors: Thomas Powers, Pavel Evtushenko
  • Publication number: 20150340834
    Abstract: A method for applying an energy dither to a charged particle beam in order to vary the wavelength of the charged particle beam. Bunches of charged particle beams are accelerated by cavities that are operated at a harmonic of the bunch repetition rate. One or more secondary radiofrequency accelerator cavities are added near the wiggler after the primary beam transport to apply a fluctuation between individual bunches with a pseudo-random distribution. The secondary radiofrequency accelerator cavities provide fine variations of the beam energy about a nominal operating point. Operating a free electron laser (FEL) with a 1% change in the electron beam energy via the secondary cavity will result in a 2% wavelength variation of the FEL output.
    Type: Application
    Filed: May 22, 2015
    Publication date: November 26, 2015
    Inventors: Thomas Joseph Powers, David R. Douglas, Pavel Evtushenko, Stephen V. Benson, George Neil