Patents by Inventor Pavel NI

Pavel NI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma light up suppression
    Patent number: 10535505
    Abstract: A method for suppressing arcing in helium distribution channels of an electrostatic chuck in a plasma processing chamber, wherein the electrostatic chuck is connected to a voltage source for providing a chucking voltage and wherein the plasma processing chamber comprises a process gas source, and a plasma power source for transforming the process gas into a plasma is provided. A gas is flowed through the helium distribution channels of an electrostatic chuck to a back side of a wafer. The gas comprises helium and an electronegative gas.
    Type: Grant
    Filed: November 11, 2016
    Date of Patent: January 14, 2020
    Assignee: Lam Research Corporation
    Inventor: Pavel Ni
  • PLASMA LIGHT UP SUPPRESSION
    Publication number: 20180138021
    Abstract: A method for suppressing arcing in helium distribution channels of an electrostatic chuck in a plasma processing chamber, wherein the electrostatic chuck is connected to a voltage source for providing a chucking voltage and wherein the plasma processing chamber comprises a process gas source, and a plasma power source for transforming the process gas into a plasma is provided. A gas is flowed through the helium distribution channels of an electrostatic chuck to a back side of a wafer. The gas comprises helium and an electronegative gas.
    Type: Application
    Filed: November 11, 2016
    Publication date: May 17, 2018
    Inventor: Pavel NI