Abstract: The invention relates to a method implemented by a data processing apparatus, comprising the steps of receiving an image; providing a set-point for a desired image quality parameter of said image; and processing said image using an image analysis technique for determining a current image quality parameter of said image. In the method, the current image quality parameter is compared with said desired set-point. Based on said comparison, a modified image is generated by using an image modification technique. The generating comprises the steps of improving said image in terms of said image quality parameter in case said current image quality parameter is lower than said set-point; and deteriorating said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point. The modified image is then output.

Abstract: Methods and systems for neural network based image restoration are disclosed herein. An example method at least includes acquiring a plurality of training image pairs of a sample, where each training image of each of the plurality of training image pairs are images of a same location of a sample, and where each image of the plurality of training image pairs are acquired using same acquisition parameters, updating an artificial neural network based on the plurality of training image pairs, and denoising a plurality of sample images using the updated artificial neural network, where the plurality of sample images are acquired using the same acquisition parameters as used to acquire the plurality of training image pairs.

Abstract: Methods of investigating a specimen using tomographic imaging include directing a beam of radiation through a specimen and onto a detector, thereby generating an image of the specimen. The directing is repeated for different specimen orientations relative to the beam, thereby generating a corresponding set of images. An iterative mathematical reconstruction technique is used to convert the images into a tomogram. The reconstruction is mathematically constrained to curtail a solution space using three-dimensional SEM imagery of at least a part of the specimen that overlaps the tomogram by requiring iterative results of the reconstruction to be consistent with pixel values derived from the SEM imagery.

Abstract: Systems and methods for controlling an imaging device are disclosed. In one aspect, a method determines a set of control parameters for the imaging device, and acquires an image based on the set of control parameters. The method determines a plurality of image quality measurements of the first image. A polygon may be displayed on an electronic display based on a plurality of image quality measurements. For example, positions of polygon vertices may be determined relative to an origin point based on corresponding image quality measurements. In some aspects, input may be received from a user interface indicating a change in position of one or more of the vertices and the corresponding image quality measurements. In some aspects, a new set of control parameters may then be determined to achieve the changed image quality measurement(s). In some aspects a composite measure of the image quality measurements may also be displayed.

Abstract: The invention relates to a method of sampling and displaying information comprising scanning a beam over the sample in a series of N overlapping sub-frames, each comprising Mn scan positions, thereby irradiating the sample at N×Mn scan positions, which form the field of view; detecting a signal, sampled for each scan position, emanating from the sample; and displaying the sub-frames having at least N×Mn pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions; in which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; and after the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first, the second, or both sub-frames.

Abstract: A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.